为了满足自适应光学技术更广泛的应用需求，针对传统变形镜体积大、成本高的问题，本文研制了基于微机电系统技术的MEMS变形镜并进行了实验测试。本文研制的变形镜共有140个六边形平行板电容静电驱动器，驱动器为12×12正方形排列，间距400 μm。采用表面MEMS工艺加工了变形镜样品，并利用陶瓷PGA管壳和石英玻璃盖板对样品进行了封装，同时还研制了与之配套的小型化多通道高压驱动电源。测试结果表明，该变形镜表面PV 值411nm，RMS值78 nm，在600 nm 到900 nm 波段的反射率接近80%，行程1.8 μm，交连值约15%，工作带宽13kHz，阶跃响应时间23 μs，具有体积小、成本低、响应快等优势。除了进行了单元性能的测试之外，还开环控制变形镜进行了Zernike 像差的拟合测试，验证了变形镜的校正能力。结果表明，该变形镜能初步满足自适应光学系统的应用需求。

For satisfying the boarder application requirement of adaptive optics (AO) and solving the problem of large volume and high cost of conventional deformable mirrors (DM), micro DM based on micro-electro-mechanical system (MEMS) technology is developed and measured. The developed DM has 140 hexagonal parallel plate capacitor electrostatic actuators. The actuators are arranged as a square array and the pitch is 400 μm. A DM prototype is fabricated by MEMS surface micromachining process and packaged by a ceramic pin grid array (CPGA). A miniaturization multi-channel high voltage driver for the DM is developed too. The measurement results show that the prototype has a surface PV value of 411 nm, RMS value of 78 nm, reflectivity of about 80% in 600 nm to 900 nm wavelength, stroke of 1.8 μm, actuator coupling of 15%, working bandwidth of 13 kHz and step response time of 23 μs. Thus the DM has the advantages of small volume, low cost and fast response. Besides the measurement of single element, the whole DM is controlled open loop to fit Zernike aberration and its fitting capability is demonstrated. Above results indicate that the DM prototype can satisfy initially the requirement of AO system.