Photonics Research, 2018, 6 (5): 05000B74, Published Online: Jul. 6, 2018
Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching [Invited] Download: 657次
Abstract
We report the fabrication and characterization of silicon carbide microdisks on top of silicon pillars suited for applications from near- to mid-infrared. We probe 10 μm diameter disks with different under-etching depths, from 4 μm down to 1.4 μm, fabricated by isotropic plasma etching and extract quality factors up to 8400 at telecom wavelength. Our geometry is suited to present high Q single-mode operation. We experimentally demonstrate high-order whispering-gallery mode suppression while preserving the fundamental gallery mode and investigate some requirements for nonlinear optics applications on this platform, specifically in terms of quality factor and dispersion for Kerr frequency comb generation.
David Allioux, Ali Belarouci, Darren Hudson, Eric Magi, Milan Sinobad, Guillaume Beaudin, Adrien Michon, Neetesh Singh, Regis Orobtchouk, Christian Grillet. Toward mid-infrared nonlinear optics applications of silicon carbide microdisks engineered by lateral under-etching [Invited][J]. Photonics Research, 2018, 6(5): 05000B74.