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快速热退火对GaAs/AlGaAs量子阱材料结构及发光特性的影响

Effect of Rapid Thermal Annealing on Structural and Luminescence Properties of GaAs/AlGaAs Quantum Wells

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摘要

研究了快速热退火(RTA) 对GaAs/AlGaAs量子阱材料结构及发光特性的影响。结果表明,当退火温度为800 ℃时,材料晶体质量和光致发光(PL)强度得到显著提升;当退火温度为900 ℃时,材料晶体质量和PL强度降低。依据峰值能量理论得到了室温下PL峰位的发光机制。通过分峰拟合发现,RTA导致PL峰位整体蓝移。PL扫描图表明,RTA可以显著提高材料的整体晶体质量和发光均匀性。

Abstract

The influence of rapid thermal annealing (RTA) on the structural and luminescence properties of GaAs/AlGaAs quantum wells is investigated. The results show that, when the annealing temperature is 800 ℃, the crystal quality and photoluminescence (PL) intensity is significantly improved. When the annealing temperature is 900 ℃, the crystal quality and PL intensity decrease. According to the peak energy theory, the luminous mechanism at room temperature of PL peaks is obtained. A whole RTA-induced blue shift of PL peaks is observed by peak-differentiating and fitting. The PL mapping demonstrates that RTA can significantly improve the whole crystal quality and the luminous uniformity of materials.

Newport宣传-MKS新实验室计划
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中图分类号:O472

DOI:10.3788/lop55.051603

所属栏目:材料

基金项目:国家自然科学基金(61404009,61474010,61574022,61504012,61674021,11674038)

收稿日期:2017-12-12

修改稿日期:2018-01-22

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智民:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
方铉:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
牛守柱:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
房丹:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
唐吉龙:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
王登魁:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
王新伟:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
王晓华:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022
魏志鹏:长春理工大学高功率半导体激光国家重点实验室, 吉林 长春 130022

联系人作者:方铉(fangxuan110@126.com)

备注:智民(1993—),男,硕士研究生,主要从事激光及其与物质相互作用方面的研究。E-mail: z401404611@163.com

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引用该论文

Zhi Min,Fang Xuan,Niu Shouzhu,Fang Dan,Tang Jilong,Wang Dengkui,Wang Xinwei,Wang Xiaohua,Wei Zhipeng. Effect of Rapid Thermal Annealing on Structural and Luminescence Properties of GaAs/AlGaAs Quantum Wells[J]. Laser & Optoelectronics Progress, 2018, 55(5): 051603

智民,方铉,牛守柱,房丹,唐吉龙,王登魁,王新伟,王晓华,魏志鹏. 快速热退火对GaAs/AlGaAs量子阱材料结构及发光特性的影响[J]. 激光与光电子学进展, 2018, 55(5): 051603

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