红外与毫米波学报, 2018, 37 (2): 140, 网络出版: 2018-05-29
全息光刻制备LC-DFB及光栅刻蚀优化
Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching
镓锑基 侧向耦合分布反馈 全息光刻 二阶布拉格光栅 GaSb-based laterally coupled distributed feedback laterally coupled distributed feedback (LC-DFB) LC-DFB holographic lithography second order Bragg grating
摘要
成功制备出室温激射波长为2 μm的GaSb基侧向耦合分布反馈量子阱激光器.采用全息曝光及电感耦合等离子体刻蚀技术制备二阶布拉格光栅.优化了光栅制备的刻蚀条件,并获得室温2 μm单纵模激射.激光器输出光功率超过5 mW,最大边模抑制比达到24 dB.
Abstract
GaSb-based laterally coupled distributed feedback (LC-DFB) quantum well lasers with a wavelength of 2 μm were successfully prepared. Second order Bragg gratings are fabricated by holographic lithography and inductively coupled plasma etching (ICP). The etching conditions for grating preparation are optimized and a single longitudinal mode lasing at room temperature is obtained. The room temperature peak power output per facet exceeds 5 mW with a maximum side-mode suppression ratio of more than 24 dB.
李欢, 杨成奥, 谢圣文, 黄书山, 柴小力, 张宇, 王金良, 牛智川. 全息光刻制备LC-DFB及光栅刻蚀优化[J]. 红外与毫米波学报, 2018, 37(2): 140. LI Huan, YANG Cheng-Ao, XIE Sheng-Wen, HUANG Shu-Shan, CHAI Xiao-Li, ZHANG Yu, WAGN Jin-Liang, NIU Zhi-Chuan. Laterally-coupled distributed feedback lasers with optimized gratings by holographic lithography etching[J]. Journal of Infrared and Millimeter Waves, 2018, 37(2): 140.
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