红外与毫米波学报, 2018, 37 (2): 168, 网络出版: 2018-05-29
高功率单高阶模倒置表面浮雕结构垂直腔面发射激光器
High power single-higher-mode VCSEL with inverted surface relief
半导体激光器 垂直腔面发射激光器 单高阶模 高温 倒置表面浮雕 semiconductor laser vertical-cavity surface-emitting laser (VCSEL) single-higher-mode high-temperature inverted surface relief
摘要
提出并研究了一种带有环形出光孔的倒置表面浮雕结构垂直腔面发射激光器.该器件最突出的结构特点在于,支持稳定的单高阶横向模式激射.在输入电流为六倍阈值电流时,输出功率高达9.8 mW,边模抑制比将近30 dB.在外界为360 K高温时,输出功率仍可达4 mW.且其远场表现出的高斯光束发散角较小.
Abstract
An inverted surface relief vertical-cavity surface-emitting laser (ISR-VCSEL) with annular light emitting window has been presented and investigated. The most prominent structural feature of the device is that the stable single-higher-order transverse mode emission is supported. The laser emits output power up to 9.8 mW at about six times threshold current with an SMSR close to 30 dB, and it can still keep the output power of 4 mW even at as high ambient temperature as 360 K. The measured far field power intensity shows a Gaussian-shaped beam profile with low divergence.
王霞, 郝永芹, 晏长岭, 王作斌, 王志伟, 谢检来, 马晓辉, 姜会林. 高功率单高阶模倒置表面浮雕结构垂直腔面发射激光器[J]. 红外与毫米波学报, 2018, 37(2): 168. WANG Xia, HAO Yong-Qin, YAN Chang-Ling, WANG Zuo-Bin, WANG Zhi-Wei, XIE Jian-Lai, MA Xiao-Hui, JIANG Hui-Lin. High power single-higher-mode VCSEL with inverted surface relief[J]. Journal of Infrared and Millimeter Waves, 2018, 37(2): 168.