光学学报, 2018, 38 (6): 0612002, 网络出版: 2018-07-09
红外光谱椭偏仪测量硫系玻璃As2Se3折射率的准确性 下载: 661次
Accuracy in Refractive Index Measurement of As2Se3 Chalcogenide Glass by IR Spectroscopic Ellipsometer
测量 折射率 准确性 红外椭偏仪 As2Se3硫系玻璃 measurement refractive index accuracy infrared ellipsometer As2Se3 chalcogenide glasses
摘要
采用自制的As2Se3玻璃棒,制备了具有不同厚度、背面粗糙度和表面光洁度的样品,借助红外光谱椭偏仪测试了样品折射率,通过光学模型拟合得到了其折射率参数。对比分析了厚度、背面粗糙度和表面光洁度对样品折射率的影响。结果表明:样品厚度、背面粗糙度和表面光洁度都会明显影响椭偏仪的测量精度,其中表面光洁度是关键因素。样品厚度应控制在1~3 mm,同时增大样品背面粗糙度和样品表面光洁度,可显著提高椭偏仪的测试精度。
Abstract
The As2Se3 specimens with different thicknesses, roughnesses and surface smoothnesses are prepared by use of homemade As2Se3 glass rods. The refractive indices are measured by the infrared spectroscopic ellipsometer, and an optical model is built to obtain the refractive indices by fitting. The influences of thickness, roughness and surface smoothness on the refractive indices of specimens are comparatively analyzed. The results show that all factors have obvious influences on the measurement accuracy of the ellipsometer and the surface smoothness is of most importance. If the specimen thickness is controlled to be 1-3 mm, and simultaneously the back side roughness and surface smoothness of specimens are increased, the measurement accuracy of the ellipsometer can be obviously enhanced.
李阳, 刘永兴, 戴世勋, 徐铁峰, 林常规, 陈飞飞. 红外光谱椭偏仪测量硫系玻璃As2Se3折射率的准确性[J]. 光学学报, 2018, 38(6): 0612002. Yang Li, Yongxing Liu, Shixun Dai, Tiefeng Xu, Changgui Lin, Feifei Chen. Accuracy in Refractive Index Measurement of As2Se3 Chalcogenide Glass by IR Spectroscopic Ellipsometer[J]. Acta Optica Sinica, 2018, 38(6): 0612002.