设计了一种基于光强调制原理和微机电系统(MEMS)技术的光纤加速度传感器。加速度传感单元为硅质矩形梁,给出了矩形梁弯曲导致的遮光板位移与接收光纤光功率差的关系以及硅质矩形梁中间位置挠度与系统加速度的关系,得到了加速度与光功率差的关系。研究结果表明,设计的光纤加速度传感器在矩形梁中间位置的挠度变化范围为0~10 μm时,相应的加速度测量范围为0~120 m·s ^-2,最大加速度检测值高达12g(g为重力加速度)。

Based on the principle of light intensity modulation and micro-electromechanical system (MEMS) technology, we design a kind of optical fiber acceleration sensor. Two silicon rectangular beams are used as the acceleration sensing elements. According to the relation between the shade displacement and the light power difference of the receiving optical fiber, as well as the relation between the deflection of the silicon rectangular beam at center position and the system acceleration, an expression of acceleration with the light power difference is given. The research result shows that, while the deflection of the silicon rectangular beam at center position is 0~10 μm, the corresponding acceleration value is 0~120 m·s -2, and the maximum acceleration detective value can be as much as 12g (g is the acceleration of gravity).