发光学报, 2018, 39 (5): 681, 网络出版: 2018-06-29  

制备工艺对掺杂NaYF4∶Er3+,Yb3+发光纳米晶的聚合物光波导放大器性能的影响

Effect of Fabrication Technology of Polymer Optical Waveguide Amplifier Based on NaYF4∶Er3+,Yb3+ Nanocrystals on Device Performance
作者单位
吉林大学电子科学与工程学院 集成光电子学国家重点实验室, 吉林省光通信聚合物波导器件工程实验室, 吉林 长春 130012
摘要
制备了NaYF4∶Er3+,Yb3+纳米晶, 表征了纳米晶的形貌, 通过物理掺杂的方式将纳米粒子掺杂到SU-8中作为光波导放大器的芯层材料, 优化了波导放大器的尺寸, 利用旋涂、刻蚀等工艺, 在二氧化硅衬底上制备了光波导放大器。实验中用光漂白法和湿法刻蚀两种方法制备光波导放大器, 分别给出了两种方法制备的器件的结构、工艺流程、光场模拟结果, 并对两种方法制备的器件的放大特性进行了测试。测试结果表明, 当980 nm波长的泵浦光功率为241 mW且1 550 nm波长的信号光功率为0.1 mW时, 使用湿法刻蚀法制备的放大器得到2.7 dB的相对增益。当980 nm波长的泵浦光功率为235 mW且1 550 nm波长的信号光功率为0.1 mW时, 使用光漂白法制备的放大器得到4.5 dB的相对增益。根据以上测试结果, 分析了两种工艺对器件性能的影响。
Abstract
NaYF4∶Er3+,Yb3+nanocrystals were synthesized and the morphology of nanocrystals was characterized. The nanocrystals were doped into SU-8 as the core material of the optical waveguide amplifier by physical doping method. The size of the waveguide amplifier was optimized. Polymer optical waveguide amplifiers were fabricated on a silica substrate by spin coating, photolithography and ICP etching. In the experiment, the optical waveguide amplifier was prepared by two methods: light bleaching and wet etching. The amplification characteristics of the devices prepared by the two methods are tested. The amplifier prepared using the wet etching method achieves a relative gain of 2.7 dB at 1 550 nm when the pump power is 241 mW and the signal light power is 0.1 mW. The amplifier prepared using the photobleaching method obtains a relative gain of 4.5 dB at 1 550 nm for 235 mW pump power and 0.1 mW signal power. Based on the above test results, the effects of the two processes on the device performance were analyzed.

邢桂超, 黄雅莉, 张美玲, 王希斌, 王菲, 张大明. 制备工艺对掺杂NaYF4∶Er3+,Yb3+发光纳米晶的聚合物光波导放大器性能的影响[J]. 发光学报, 2018, 39(5): 681. XING Gui-chao, HUANG Ya-li, ZHANG Mei-ling, WANG Xi-bin, WANG Fei, ZHANG Da-ming. Effect of Fabrication Technology of Polymer Optical Waveguide Amplifier Based on NaYF4∶Er3+,Yb3+ Nanocrystals on Device Performance[J]. Chinese Journal of Luminescence, 2018, 39(5): 681.

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!