提出了一种快速生成高斯型去除函数的实验方法。通过研究倾斜定点入射方式下射流束中心与工件的交点和材料去除形貌之间的关系,得到了对应高斯型去除函数的喷嘴高度范围。在确定的工艺参数条件下,添加主轴旋转运动,得到了对应高斯型去除函数的喷嘴高度。对高斯型抛光斑进行了对称性分析和动态去除实验。结果表明,以高斯斑为基础的动态去除过程具有较高稳定性,能满足超精密光学加工的要求,同时也证明了该方法的高效性和可靠性。

A kind of experimental method for quickly forming the Gaussian-shaped removal function is proposed. The corresponding nozzle height range of Gaussian-shaped removal function is obtained by the investigation of the relationship between the material removal appearance and the intersection point of the fluid jet center and the workpiece under the tilt fixed-point incidence mode. As for the definite process parameters, the corresponding nozzle height of Gaussian-shaped removal function is obtained by the addition of the rotary motion of the principal axis. The symmetry of the Gaussian-shaped polishing spot is analyzed and the dynamic removal experiment is conducted. The results show that the dynamic removal process based on Gaussian spots possesses a good stability, which can meet the demand of the ultra-precision optical manufacture and also can confirm the efficiency and reliability of this method.