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标定误差对色散条纹共相误差检测影响的修正

Correction for Effect of Calibration Error on Accuracy of Co-Phasing Error Detection of Dispersed Fringe

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摘要

色散条纹共相误差检测技术需要以一定的方法对采集的色散条纹图像进行分析处理,才能得到所对应的平移误差值。与其他色散条纹分析方法相比,主峰位移提取法能够同时适用于大量程以及一个波长以内小量程的平移误差检测。但是,该方法的检测精度容易受到条纹中心线标定误差的影响。为对该影响进行修正,首先通过分析平移误差对双孔衍射图样的影响,提出了一种条纹中心线位置自适应提取方法;在此基础上,结合主峰位移提取法的基本原理,提出了修正条纹中心线标定误差影响的方法;最后搭建实验光路,验证了所提修正方法的有效性。实验结果表明,在存在中心线标定误差的情况下,所提方法能够取得小于30 nm的测量精度,相比于修正之前精度大大提高。该方法有效地提高了主峰位移提取法的的抗干扰能力与工程实用性。

Abstract

The dispersed fringe co-phasing error detection technology needs a certain method to analyze and process the acquired dispersed fringe image to obtain the corresponding piston error value. Compared with other dispersed fringe image processing methods, the main peak position extraction method can be applied to the detection of piston error in large range or in small range within one wavelength. However, the detection accuracy of the method is very sensitive to the calibration error in the central line position of the dispersed fringe. To modify the effect of this calibration error, this paper firstly proposes a self-adaptive extraction method for fringe central line position based on the analysis of the influence of the piston error on the diffraction pattern of double rectangle hole. Based on this, combined with the basic principle of the main peak position extraction method, a method of correcting the influence of fringe central line calibration error is proposed. Finally, an experimental light path is built to verify the effectiveness of the proposed correction method. The experimental results show that the proposed method can achieve a measurement accuracy of less than 30 nm in the presence of the central line calibration error, which is greatly improved compared to the accuracy before correction. This method effectively improves the anti-jamming capability and engineering practicality of the main peak position extraction method.

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中图分类号:O439

DOI:10.3788/aos201838.0711003

所属栏目:成像系统

基金项目:国家自然科学基金(61205143)

收稿日期:2018-02-08

修改稿日期:2018-03-15

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张春悦:中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033中国科学院大学, 北京 100049
徐抒岩:中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033
许博谦:中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033
齐鑫:中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033中国科学院大学, 北京 100049
鞠国浩:中国科学院长春光学精密机械与物理研究所, 吉林 长春 130033

联系人作者:徐抒岩(xusy@ciomp.ac.cn)

备注:张春悦(1992-),女,硕士研究生,主要从事拼接型大口径成像系统主动光学波前传感方面的研究。E-mail: zhangchunyue1992@163.com

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引用该论文

Zhang Chunyue,Xu Shuyan,Xu Boqian,Qi Xin,Ju Guohao. Correction for Effect of Calibration Error on Accuracy of Co-Phasing Error Detection of Dispersed Fringe[J]. Acta Optica Sinica, 2018, 38(7): 0711003

张春悦,徐抒岩,许博谦,齐鑫,鞠国浩. 标定误差对色散条纹共相误差检测影响的修正[J]. 光学学报, 2018, 38(7): 0711003

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