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基于条纹反射的超精密车削反射镜的在位面形检测

On-Machine Surface Shape Measurement of Reflective Mirrors by Ultra-Precision Turning Based on Fringe Reflection

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摘要

针对单点金刚石车削金属反射镜的加工检测迭代周期较长的问题,引入了动态范围大、检测速度快的条纹反射法,实现了对金属反射镜的在位面形检测,提高了制造效率。对条纹反射面形检测原理进行了研究,通过光线追迹程序对口径为100 mm的反射镜面进行了模拟仿真,分析了条纹反射在位面形检测系统完成微米级面形检测时的位姿标定需求;对口径为100 mm的凹球面金属反射镜进行了在位检测,测量精度优于1 μm。研究结果对单点金刚石车削反射镜的加工提供了参考。

Abstract

As for the problem of long machining and measurement iteration cycle of metal reflectors by the single point diamond turning, the fringe reflection method with a large dynamic range and fast detection speed is introduced, and the on-machine surface measurement of metal reflectors is realized, which improves the manufacturing efficiency. The mechanism of surface shape measurement based on fringe reflection is investigated. By the ray tracing program, the simulation is conducted as for the reflector surface with an aperture of 100 mm and the micron-sized requirement of position calibration in the fringe reflection on-machine surface shape measurement system is analyzed. The on-machine measurement of concave spherical metal reflectors with an aperture of 100 mm is carried out, and the measurement precision is superior to 1 μm. This research provides a certain reference for the machining of reflector by the single point diamond turning.

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中图分类号:TN247

DOI:10.3788/lop55.071203

所属栏目:仪器,测量与计量

基金项目:国家自然科学基金青年科学基金(61605202)、国家自然科学基金国际合作项目(61210015)、中国科学院前沿科学重点研究项目(QYZDJ-SSW-JSC038-02)

收稿日期:2018-01-11

修改稿日期:2018-01-31

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邵山川:中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室, 吉林 长春 130033中国科学院大学, 北京 100049
陶小平:中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室, 吉林 长春 130033
王孝坤:中国科学院长春光学精密机械与物理研究所光学系统先进制造技术重点实验室, 吉林 长春 130033

联系人作者:王孝坤(jimwxk@sohu.com)

备注:邵山川(1992—),男,硕士研究生,主要从事条纹反射面形检测技术方面的研究。E-mail: wfhtssc@163.com

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引用该论文

Shao Shanchuan,Tao Xiaoping,Wang Xiaokun. On-Machine Surface Shape Measurement of Reflective Mirrors by Ultra-Precision Turning Based on Fringe Reflection[J]. Laser & Optoelectronics Progress, 2018, 55(7): 071203

邵山川,陶小平,王孝坤. 基于条纹反射的超精密车削反射镜的在位面形检测[J]. 激光与光电子学进展, 2018, 55(7): 071203

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