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单频激光干涉测振仪的非线性误差主动补偿法

Active Compensation Method of Nonlinear Error in Homodyne Laser Interferometer for Vibration Measurement

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摘要

为了提高单频激光干涉测振系统的测量精度,提出了一种基于伪极值的非线性误差实时主动补偿方法,该方法使用伪极值计算直流偏置误差和不等幅误差,通过矢量相位校正运算抑制非正交误差。实验结果表明:该方法降低了测量期间因激光器功率漂移、Abbe误差导致的正交信号椭圆轨迹螺旋化形变,以及因数字信号传输误码造成的异常数据对非线性误差补偿的影响。在搭建的单频激光干涉测振系统中,使用伪极值法结合矢量相位校正运算方法可将周期性剩余误差峰峰值降低至0.8 nm,比传统的极值法具有更好的非线性误差抑制效果,且该方法不需要复杂的运算,保持了良好的实时性。

Abstract

In order to improve the measurement precision of the homodyne laser interferometer for vibration measurement, we propose a real-time active nonlinear compensation method based on the pseudo-extremums. According to this method, the pseudo-extremums instead of the extremums are used to determinate the direct current (DC) offset and alternating current (AC) amplitude difference. Then the quadrature phase shift is suppressed by the operation for vector phase correction. Experimental results show that the method proposed can reduce the error caused by the bit error of digital signal transmission, laser power drift and Abbe error during measurement. Laser power drift and Abbe error make the elliptic trajectory of quadrature signals into a spiral shape. The peak-to-valley amplitude of residual error can be reduced to 0.8 nm by using the pseudo-extremums method with the operation for vector phase correction, which has a more effective suppression for nonlinear error than the conventional extremums method. Besides, the method proposed does not need complex calculation and remains good instantaneity.

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中图分类号:TN247;TN958.98

DOI:10.3788/lop55.081204

所属栏目:仪器,测量与计量

基金项目:中国科学院国防科技创新基金(CXJJ-17S025)

收稿日期:2018-02-05

修改稿日期:2018-03-21

网络出版日期:2018-03-28

作者单位    点击查看

张埔榛:中国科学院大学, 北京 100049中国科学院上海技术物理研究所空间主动光电技术重点实验室, 上海 200083
吴军:中国科学院上海技术物理研究所空间主动光电技术重点实验室, 上海 200083
黄庚华:中国科学院大学, 北京 100049中国科学院上海技术物理研究所空间主动光电技术重点实验室, 上海 200083

联系人作者:黄庚华(genghuah@mail.sitp.ac.cn); 张埔榛(zhang_pu_zhen@126.com);

【1】XingC Q. Research on non-contact vibration measurement technology based on optical fiber interferometer[D]. Dalian: Dalian University of Technology, 2013: 1-3.
邢传奇. 基于光纤干涉仪的非接触振动测试技术研究[D]. 大连: 大连理工大学, 2013: 1-3.

【2】Li N, Han X J, Li J H. Ground testing method for spacecraft micro-vibration signals[J]. Spacecraft Environment Engineering, 2011, 28(1): 67-71.
李宁, 韩晓健, 李俊慧. 航天器微振动信号的地面测试方法[J]. 航天器环境工程, 2011, 28(1): 67-71.

【3】Zhang H Y, Zhao C M, Jiang Q J, et al. Laser detection on micro-doppler effect in coherent ladar[J]. Chinese Journal of Lasers, 2008, 35(12): 1981-1985.
张海洋, 赵长明, 蒋奇君, 等. 基于相干激光雷达的激光微多普勒探测[J]. 中国激光, 2008, 35(12): 1981-1985.

【4】Hou W M, Zhang Y B, Le Y F, et al. Elimination of the nonlinearity of heterodyne displacement interferometers[J]. Chinese Journal of Lasers, 2012, 39(9): 0908006.
侯文玫, 张运波, 乐燕芬, 等. 外差激光干涉测长非线性误差的消除[J]. 中国激光, 2012, 39(9): 0908006.

【5】Zeng W, Chen P F, Zhu M Z. Review and outlook on laser vibration measurement[J]. OME Information, 2005(5): 16-19.
曾为, 陈培峰, 朱明珠. 激光振动测量的发展与展望[J]. 光机电信息, 2005(5): 16-19.

【6】Li L Y, Wu B, Yuan Y G, et al. Research on nonlinear error compensation method for single-frequency laser interferometer[J]. Acta Optica Sinica, 2011, 31(7): 0726003.
李立艳, 吴冰, 苑勇贵, 等. 单频激光干涉仪非线性误差补偿方法研究[J]. 光学学报, 2011, 31(7): 0726003.

【7】Le Y F, Ju A S. Analysis and measurement of the nonlinear errors in heterodyne interferometers[J]. Laser & Optoelectronics Progress, 2016, 53(5): 051203.
乐燕芬, 句爱松. 外差激光干涉仪非线性误差分析及测量[J]. 激光与光电子学进展, 2016, 53(5): 051203.

【8】Deng Y L, Li X J, Geng Y F, et al. Influence of nonpolarizing beam splitters on nonlinear error in heterodyne interferometers[J]. Acta Optica Sinica, 2012, 32(11): 1112008.
邓元龙, 李学金, 耿优福, 等. 非偏振分光镜对外差干涉仪非线性误差的影响[J]. 光学学报, 2012, 32(11): 1112008.

【9】Heydemann P L. Determination and correction of quadrature fringe measurement errors in interferometers[J]. Applied Optics, 1981, 20(19): 3382-3384.

【10】Kim J A, Kim J W, Kang C S, et al. Technical design note: a digital signal processing module for real-time compensation of nonlinearity in a homodyne interferometer using a field-programmable gate array[J]. Measurement Science and Technology, 2009, 20(1): 017003.

【11】Li Z, Herrmann K, Pohlenz F. A neural network approach to correcting nonlinearity in optical interferometers[J]. Measurement Science and Technology, 2003, 14(3): 376-381.

【12】Poar T, Moina J. Enhanced ellipse fitting in a two-detector homodyne quadrature laser interferometer[J]. Measurement Science and Technology, 2011, 22(8): 085301.

【13】Kning R, Wimmer G, Witkovsk V. Ellipse fitting by nonlinear constraints to demodulate quadrature homodyne interferometer signals and to determine the statistical uncertainty of the interferometric phase[J]. Measurement Science and Technology, 2014, 25(11): 115001.

【14】Eom T B, Kim J Y, Jeong K. The dynamic compensation of nonlinearity in a homodyne laser interferometer[J]. Measurement Science and Technology, 2001, 12(10): 1734-1738.

【15】Dai G L, Pohlenz F, Danzebrink H, et al. Improving the performance of interferometers in metrological scanning probe microscopes[J]. Measurement Science and Technology, 2004, 15(2): 444-450.

【16】Hu P C, Zhu J H, Guo X B, et al. Compensation for the variable cyclic error in homodyne laser interferometers[J]. Sensors, 2015, 15(2): 3090-3106.

【17】Keem T, Gonda S, Misumi I, et al. Removing nonlinearity of a homodyne interferometer by adjusting the gains of its quadrature detector systems[J]. Applied Optics, 2004, 43(12): 2443-2448.

【18】Keem T, Gonda S, Misumi I, et al. Simple, real-time method for removing the cyclic error of a homodyne interferometer with a quadrature detector system[J]. Applied Optics, 2005, 44(17): 3492-3498.

【19】Ahn J, Kim J A, Kang C S, et al. A passive method to compensate nonlinearity in a homodyne interferometer[J]. Optics Express, 2009, 17(25): 23299-23308.

【20】Guo X B. Research on key technology of homodyne laser interference vibration measurement[D]. Harbin: Harbin Institute of Technology, 2015: 21-24.
郭玄标. 单频激光干涉测振关键技术研究[D]. 哈尔滨: 哈尔滨工业大学, 2015: 21-24.

【21】Hu P C, Zhu J H, Zhai X Y, et al. DC-offset-free homodyne interferometer and its nonlinearity compensation[J]. Optics Express, 2015, 23(7): 8399-8408.

【22】Hu P C, Pollinger F, Meiners-Hagen K, et al. Fine correction of nonlinearity in homodyne interferometry[J]. Proceedings of SPIE, 2010, 7544: 75444E.

引用该论文

Zhang Puzhen,Wu Jun,Huang Genghua. Active Compensation Method of Nonlinear Error in Homodyne Laser Interferometer for Vibration Measurement[J]. Laser & Optoelectronics Progress, 2018, 55(8): 081204

张埔榛,吴军,黄庚华. 单频激光干涉测振仪的非线性误差主动补偿法[J]. 激光与光电子学进展, 2018, 55(8): 081204

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