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基于AlN的MEMS变形镜仿真及驱动性能研究

Simulation and Driving Performance of AlN-Based MEMS Deformable Mirror

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摘要

设计了一种基于氮化铝(AlN)材料的压电连续面型变形镜,采用理论分析和COMSOL仿真对该AlN MEMS变形镜的结构进行了优化,拟合了前14项Zernike多项式 ,对其驱动性能特别是像差矫正能力进行了系统研究。研究结果表明,该变形镜表现出与COMSOL工艺相兼容、制备工艺简单且环保的特点,具有线性控制、大形变量的优势,满足一般自适应光学系统的要求。

Abstract

An AlN-based piezoelectric continuous membrane deformable mirror is designed. Based on the theoretical analysis and COMSOL simulation, the structure of AlN MEMS deformable mirror is optimized and the first 14-term Zernike polynomials are fitted. Its driving performances, especially its aberration correction ability, are investigated systematically. The research results show that such a deformable mirror has the advantages of excellent linear control and large deformation. It is compatible with the COMSOL process, and its processing technique is simple and environmentally friendly, which meets the general requirements of self-adaptive optical system.

Newport宣传-MKS新实验室计划
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中图分类号:TH744

DOI:10.3788/lop55.082204

所属栏目:光学设计与制造

基金项目:中央高校基本科研业务费专项资金(2016JCTD112)、深圳市基础研究计划(JCYJ20160414102014801)

收稿日期:2018-03-07

修改稿日期:2018-03-09

网络出版日期:2018-03-19

作者单位    点击查看

邵健:华中科技大学光学与电子信息学院, 湖北 武汉 430074
李琦:华中科技大学光学与电子信息学院, 湖北 武汉 430074
余洪斌:华中科技大学光学与电子信息学院, 湖北 武汉 430074深圳华中科技大学研究院, 深圳 518000

联系人作者:余洪斌(yuhb@hust.edu.cn); 邵健(760909670@qq.com);

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引用该论文

Shao Jian,Li Qi,Yu Hongbin. Simulation and Driving Performance of AlN-Based MEMS Deformable Mirror[J]. Laser & Optoelectronics Progress, 2018, 55(8): 082204

邵健,李琦,余洪斌. 基于AlN的MEMS变形镜仿真及驱动性能研究[J]. 激光与光电子学进展, 2018, 55(8): 082204

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