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光栅横向剪切干涉仪系统误差的校正方法

Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer

张璐   向阳  
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摘要

针对光栅横向剪切干涉仪研究了旋转绝对检测的方法,并用前36项Zernike多项式标定出剪切装置的系统误差非对称项。研究结果表明,将面形检测的绝对算法应用于检测镜头系统波像差,在干涉仪系统误差消除后可以达到相对理想的检测精度。实验数据的重复性的均方根可以达到0.14 nm。

Abstract

The rotation absolute algorithm is stuided for the grating lateral-shearing interferometer, and the first 36-term Zernike polynomials are used to characterize the asymmetric term in the systemic errors of the shearing setup. The research results show that the relatively ideal measurement precision can be obtained after the systemic errors are removed if the absolute algorithm of surface figure testing is used to the testing of wavefront aberration in lens system. In addition, the RMS of the repeatability of the experimental data can approach 0.14 nm.

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中图分类号:O436

DOI:10.3788/cjl201845.0804008

所属栏目:测量与计量

基金项目:国家重大科技专项(2009ZX02005)

收稿日期:2018-03-15

修改稿日期:2018-04-13

网络出版日期:2018-04-19

作者单位    点击查看

张璐:中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033中国科学院大学, 北京 100049
向阳:中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室, 吉林 长春 130033

联系人作者:向阳(y.xiang@sklao.ac.cn); 张璐(zhanglu314@mails.ucas.ac.cn);

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引用该论文

Zhang Lu,Xiang Yang. Correction Algorithm of Systemic Errors in Grating Lateral-Shearing Interferometer[J]. Chinese Journal of Lasers, 2018, 45(8): 0804008

张璐,向阳. 光栅横向剪切干涉仪系统误差的校正方法[J]. 中国激光, 2018, 45(8): 0804008

被引情况

【1】张文颖,朱浩然,李美萱,郭泽萱,郭明. 基于自准直仪的测角传感器实时在位校准方法. 中国激光, 2019, 46(4): 404005--1

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