质子注入型面发射激光器相干耦合阵列能够实现同相模式的激射, 但是由于制作过程中的工艺不均匀性引起单元间存在相位差, 影响光束的质量。本文通过设计分离电极结构, 使每个单元注入的电流得到分别的控制, 实现了3单元三角排列阵列高光束质量同相耦合模式的激射。阵列远场发散角仅为3.4°, 大约有25.6%的全部能量聚集在中心光斑。激射光谱的线宽为0.24 nm, 边模抑制比为27 dB。该方法能够有效提高相干耦合阵列的光束质量, 弥补制作工艺中引入的单元不均匀性, 提高器件的可靠性和实用性。质子注入方法简单、成本低, 能够成为制作高光束质量相干耦合阵列的一个重要方法。

In-phase mode operation can be obtained from implant-defined vertical cavity surface emitting laser arrays. However, the non-uniformities in the fabrication process induce the relative phase difference, which can impact the beam quality. In this paper, multi contacts were designed to make current injection into each element separately. In-phase mode with high beam quality was achieved in 3-element arrays. The divergence of the array is only 3.4°. About 25.6% of total power is concentrated in the central lobe. The line width in the spectrum is 0.24 nm. The side mode suppress ratio(SMSR) is 28 dB. The method can improve the beam quality of coherently coupled arrays effectively. It can also mend the non-uniformity of the elements in fabrication process, improving the reliability and practicability. The method of proton implantation is simple and of low cost, which can be an alternative to fabricate coherently coupled arrays.