自修整能力是评价亲水性固结磨料研磨垫加工性能的重要指标。本文选择不同浓度的乙醇水溶液作为研磨介质, 表征了亲水性固结磨料垫基体在研磨介质中的溶胀率与砂浆磨损速率, 探索了亲水性固结磨料垫在不同研磨介质条件下研磨石英玻璃的加工性能, 采用亲水性固结磨料垫在不同阶段的材料去除速率变化(Material Removal Rate Variation, MRRV)衡量固结磨料垫的自修整能力。结果表明: 随着研磨介质中乙醇浓度的增加, 溶胀率与砂浆磨损速率均增大, 分别达到了1.05%与5.5 mg/h, 不仅研磨垫的材料去除率与表面质量得到了提高, 同时, 不同阶段的MRRV大幅减小, 体现了更优的自修整能力。当乙醇浓度为25%时, 平均材料去除率达到11.82 μm/min, 表面粗糙度Ra为75 nm, 磨料垫具备了良好的加工性能。研磨介质中引入乙醇能有效提高固结磨料垫的加工性能。

Self-condition property is one of the most important parameters to evaluate the processing performance of hydrophilic fixed abrasive pad. In this paper, the ethanol solution with different concentrations was selected as the abrasive media, and the swelling rate and slurry wear rate were developed to characterize the property of the matrix for hydrophilic fixed abrasive pad. The processing properties were described with the quartz glass lapping experiment with those slurries. Material Removal Rate Variation(MRRV) was proposed to measure the stability degree of the processing. The results show that, with the increase of the ethanol concentration in the abrasive media, the swelling rate and the slurry wear rate increase, which reach 1.05% and 5.5 mg/h, respectively. Not only the material removal rate and the surface quality of the abrasive pad are improved, but the MRRV of different stages decrease greatly, which show the better self-conditioning ability. When the ethanol concentration is 25%, the average material removal rate reaches 11.82 μm/min, and the surface roughness Ra is 75 nm, which has good processing performance. It shows that the study presented in the paper can effectively improve the processability of the hydrophilic fixed abrasive pad.