为实现高回转精度多阶柱状微电极的高效加工, 对多阶柱状电极电化学刻蚀过程进行了深入的研究与改进。首先, 根据电化学刻蚀理论推导了加工电流对电极直径变化的影响规律; 通过试验证明了电极旋转可提高电流变化速率及有效起始电流进而提高加工效率, 定性分析了电极旋转对电极回转精度的影响, 提出了分阶变转速高效加工高回转精度多阶柱状微电极的方法; 通过试验分析了各加工参数(电极转速、加工电压和切断电流)对电极形状及尺寸的影响; 最后, 在优化后的加工参数下, 成功加工得到末端直径小于15 μm且同轴度误差在1 μm以内的多阶柱状微电极, 与常规电化学刻蚀工艺相比, 显著提高了加工效率。试验证明旋转电化学刻蚀是一种能够较好地提高微电极加工效率及回转精度的新工艺。

In order to achieve the high-efficiency machining of multi-stepped cylindrical microelectrode with high rotating precision, the electrochemical etching process of multi-stepped electrode was studied and improved deeply. Firstly, according to the principle of electrochemical etching, the effect of machining current on the change of electrode diameter was deduced. Secondly, the experiments proved that the electrode rotation could improve the current change rate and the effective initial current and thus improved the machining efficiency. And then, the influence of electrode rotation on the rotating precision of the electrode was analyzed, and the method of fabricating multi-stepped cylindrical microelectrode with high rotating precision efficiently by different rotation speeds combination was proposed. Thirdly, the influence of machining parameters, such as the rotation speed, the voltage and the cut-off current, on the shape and size of the electrodes were analyzed. Finally, by using the optimized machining parameters, multi-stepped cylindrical microelectrodes with end diameter less than 15 μm and the coaxial error within 1 μm were successfully fabricated. Compared with the conventional electrochemical etching process, the method presented in the paper improves the machining efficiency significantly. It is proved that rotating electrochemical etching is a better method to improve the machining efficiency and rotating precision of microelectrodes.