近年来国内外在可调谐垂直腔面发射激光器这一研究领域取得了极大的进步。叙述了可调谐垂直腔面发射激光器的结构原理和发展历程, 对不同结构的优缺点作了对比介绍, 展望了可调谐激光器的发展前景。这种器件在光传输、光互连及光并行信息处理等方面有着良好的应用前景。

In recent years, great progress has been made in the field of tunable vertical cavity surface emitting lasers. The vertical cavity surface emitting laser is perpendicular to the substrate, and this novel structure has the advantages, such as small optical divergence angle, being suitable for integration with other optoelectronic devices, and testing in chip. Simulation method was used to simulate wavelength tunable vertical cavity surface-emitting lasers with micro-mechanical structure. The structure, principle and development history of tunable vertical cavity surface emitting lasers were described. The advantages and disadvantages of different structures were introduced. The development prospects of tunable lasers were also discussed. Wavelength tunable lasers of light source can make network construction cost lower. Large range tunable lasers without mode hop can be used for high-resolution laser spectroscopy and laser ranging. This kind of device has good application prospects in optical transmission, optical interconnection and optical parallel information processing.