中国激光, 2018, 45 (9): 0904002, 网络出版: 2018-09-08
基于强度传输方程的激光损伤应力检测技术研究 下载: 732次
A TIE Based Technique for Measurement of Stress Generated by Laser Induced Damage
测量 相位恢复 强度传输方程 应力双折射 损伤检测 measurement phase retrieval transport of intensity equation stress birefringence damage detection
摘要
提出了基于强度传输方程(TIE)的光学元件激光损伤应力检测方法, 通过采集损伤点区域聚焦位置附近的三幅强度图像, 直接计算出损伤点产生的应力双折射相位分布, 并在此基础上实现了激光损伤应力的定量检测。相较于其他相位测量技术, TIE方法在恢复的相位结果中不会出现幅度为π的相位跃变, 而且可以采用非相干光照明, 具有光路结构简单、操作方便和测量速度快等优势, 适用于光学元件损伤的快速检测。对石英玻璃在二氧化碳激光器作用下所产生的系列损伤点进行了实际验证测量, 测量结果完全符合理论预期。
Abstract
A transport of intensity equation (TIE) based technique is proposed to measure the stress generated by the laser induced damage on the optical elements. By recording three intensity images around the focal plane in damage point area, we directly calculate the stress birefringence phase distribution generated by the damage point, and realize the quantitative detection of stress generated by laser induced damage. Compared to other phase measurement techniques, the proposed TIE based technique doesn′t suffer the disadvantage of the amplitude of π sudden change in the retrieval phase, and can be realized with incoherent light beam illumination. It has the advantages of simple optical path structure, easy operation and rapid measurement, thus it′s an ideal technique for the fast measurement of residual stress generated by laser induced damage on the optical elements. We detect a series of damage points produced by quartz glass under the action of CO2 laser, and the results are completely consistent with theoretical expectations.
雷耀, 刘诚, 程北, 张雪洁, 刘志刚. 基于强度传输方程的激光损伤应力检测技术研究[J]. 中国激光, 2018, 45(9): 0904002. Lei Yao, Liu Cheng, Cheng Bei, Zhang Xuejie, Liu Zhigang. A TIE Based Technique for Measurement of Stress Generated by Laser Induced Damage[J]. Chinese Journal of Lasers, 2018, 45(9): 0904002.