光学学报, 2018, 38 (9): 0912004, 网络出版: 2019-05-09
大口径激光钕玻璃均匀性拼接检测技术 下载: 858次
Splicing Detection Technique of Homogeneity of Large-Aperture Laser Neodymium Glass
摘要
提出了基于600 mm口径干涉仪的一维子孔径拼接测量方法,通过像素错位误差模拟分析结果,设计并研制了一维大行程气浮型精密扫描拼接平台,实现了对角线接近1 m的大口径激光玻璃的全口径光学均匀性拼接检测,并对该技术的拼接测量精度和重复性进行了验证。结果表明:拼接结果平滑,均匀性拼接测量与直接测量结果的相对误差优于2×10
-7,全口径均匀性的重复性优于4×10
-8,单口径均匀性测量结果与拼接后相同区域的均匀性结果最大差异为2×10
-7。
Abstract
A measurement technique of one-dimensional (1D) sub-aperture splicing based on an interferometer with the aperture of 600 nm is proposed. With the analysis of pixel offset error simulation results, a 1D large air-float precision scanning splicing platform is designed and developed, the splicing detection of full aperture optical homogeneity of a large aperture laser glass with a diagonal close to 1 m is realized, and the accuracy and the repeatability of this technique are tested. The results show that the splicing results are smooth, the relative error between the homogeneous splicing and direct measurement results is superior to 2×10
-7, the repeatability of full aperture homogeneity is superior to 4×10
-8, and the largest difference between the measurement homogeneity results of single-aperture and the same region after splicing is 2×10
-7.
白云波, 周游, 刘世杰, 邵建达, 徐隆波. 大口径激光钕玻璃均匀性拼接检测技术[J]. 光学学报, 2018, 38(9): 0912004. Yunbo Bai, You Zhou, Shijie Liu, Jianda Shao, Longbo Xu. Splicing Detection Technique of Homogeneity of Large-Aperture Laser Neodymium Glass[J]. Acta Optica Sinica, 2018, 38(9): 0912004.