为了提高国内大尺寸光学微结构薄膜的光学级模具制造水平, 打破国外在辊筒模具超精密加工装备的垄断, 完成了国内首台套大尺寸光学微结构辊筒模具超精密机床的设计、集成以及典型微结构工艺的研究工作。首先, 根据辊筒模具表面微结构加工工艺的特点, 分析了辊筒模具超精密机床的关键技术并完成了机床结构与运动控制系统设计。在机床系统集成后, 完成了运动控制系统的调试。直线轴执行阶梯运动完成了直线轴运动分辨率的测试。其次, 通过准直仪和激光干涉仪完成了机床关键轴系的直线度及定位精度的测试和补偿。最后, 采用多步切削法切削实验, 以降低毛刺高度为目标, 完成了V槽阵列的加工工艺参数优化。经测试, 该超精密加工机床的直线运动分辨可达到5 nm, 直线轴的双向定位精度均优于1 μm/1 100 mm; 采用多步切削法加工V槽阵列, 最后一次切削深度建议在1~2 μm, 可以获得合格的V槽阵列。

In order to improve the domestic roll-to-roll manufacturing level of optical microstructure films and change the fact that the manufacture of nearly all ultra-precision roll machining equipment is monopolized by foreign companies, the first domestic ultra-precision roll lathe is designed and integrated successfully with process experiments for typical microstructures. First, according to the characteristics of optical microstructures for roller mold processing, the key technologies of machine tools were analyzed. From this analysis, the machines structure and motion control system are designed. After integration of the machine tool system, debugging of the motion control system and linear axis motion resolution tests are carried out. Second, the straightness and positioning accuracy of each axis are measured and compensated using a collimator and laser interferometer. Finally, parameter optimization tests for reducing the burr height when manufacturing V-groove arrays are performed through a cutting experiment by using a multi-step cutting method. Experimental results indicate that the linear motion resolution of the ultra-precision machining lathe can reach 5 nm, full-stroke bi-directional positioning accuracy of the linear axis is better than 1 μm, and the V-groove micro-structure array processed with a final cutting depth of 1—2 μm has excellent surface quality.