为了便于光程差的调节, 利用全反射棱镜结构改进了传统的M-Z干涉系统, 并建立了基于双波长干涉原理的M-Z测量系统理论模型。利用Zemax建立了完整的光学系统模型, 对整个系统进行仿真分析测试。系统像质评价结果表明: 532 nm～632.8 nm波段范围内系统的能量集中度达85%、畸变值小于0.02%、截止频率10 lp/mm时调制传递函数在0.9以上, 满足对透射型试样进行测量的成像要求, 为高性能干涉系统实用化提供了理论依据和技术支持。

In order to facilitate the adjustment of optical path difference,the conventional Mach-Zehnder (M-Z) interference system was improved by using the total reflection prism,and the theoretical model of M-Z measurement system based on the principle of dual-wavelength interference was established. A complete optical system model was built using Zemax, and the entire system was simulated and tested.The results of image quality evaluation show that the energy concentration of the system within the range of 532 nm~632.8 nm is 85%, the distortion value is less than 0.02% and the modulation transfer function is above 0.9 at the cut-off frequency of 10 lp/mm, which meets the system imaging requirements for the tests of transmissive sample. It provides a theoretical basis and technical support for the practical application of high performance interference systems.