为了保障太赫兹探测器测试的准确度和可信度, 对太赫兹探测器响应度定标溯源技术进行研究, 针对常用太赫兹探测器黑体辐射测试技术存在对环境、设备要求高和搭建难度大等问题, 以中国计量科学研究院的热电型太赫兹探测器作为计量标准, 提出一种校准方案, 设计搭建了一套太赫兹探测器响应度定标系统。为提高定标准确度, 实验测试了定标光学系统的光束质量, 并合理设置光阑孔径以满足定标要求。在0.1 THz频点处对2个响应度未知的场效应自混频太赫兹探测器进行响应度定标。结果表明, 定标的相对扩展不确定度为6.80% (k=2), 验证了定标系统的可行性, 系统可实现太赫兹探测器功率响应度溯源到国家激光功率标准, 保障太赫兹功率测量的准确可靠。

In order to calibrate the terahertz detector to ensure its accuracy and reliability of measurement, the calibration technology for responsivity of terahertz detector was studied. For commonly used blackbody radiation test technology for terahertz detector, there have been several problems such as high requirements on the environment, equipment and the difficulties in establishment. Taking the thermoelectric terahertz detector developed by the National Institute of Metrology as a standard detector, a calibration scheme was proposed and a responsivity calibration system for terahertz detector was designed and established. To improve the calibration accuracy, the beam quality of the calibration optical system was experimentally tested and the diaphragm aperture was set reasonably to meet the calibration requirements. At 0.1 THz, the responsivity of two field-effect self-mixing terahertz detectors were calibrated. The results show that the relatively extended uncertainty is 6.80% (k=2), verifying the feasibility of the calibration system. In the system, the power responsibility of terahertz detector can be traceable to the National Terahertz Power Standard and ensure the accuracy and reliability of terahertz power measurement.