针对准分子激光器温度控制系统的大时间滞后特点,利用MATLAB对准分子激光器温度 控制系统进行模型辨识,设计了一种新型Smith-PID预估复合控制器。在此基础上分别对两种控 制器进行仿真和实验。结果表明与常规PID控制器相比, Smith-PID预估复合控制器超调量减少41%, 调节 时间减少51%。所设计控制器具有稳健性强、超调量小及调节时间短等优点,可为准分子激光器的运行提供良好的温度控制环境。

Aiming at the large time delay characteristics of excimer laser temperature control system, the model identification of excimer laser temperature control system is carried out using MATLAB, and a new Smith-PID prediction compound controller is designed. On this basis, two kinds of controllers are simulated and experimented respectively. Results show that compared with the conventional PID controllers, the overshoot of Smith-PID prediction compound controller is reduced by 41% and the adjustment time is reduced by 51%. The designed controller has the advantages of strong robustness, small overshoot and short adjusting time, which can provide a favorable temperature control environment for the operation of excimer lasers.