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光学膜厚的监控方法

Monitoring Method of Optical Film Thickness

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摘要

提出了一种提高光电极值法中膜层厚度监控精度的新方法。通过提高判读点的精度, 避免了光学极值法中停镀时存在的随机误差; 通过算法的处理, 将监控信号和光学厚度间的非线性关系转变成了线性关系, 并推算出最佳起判时间, 避免了监控薄膜沉积时非线性误差对极值点判别的影响。

Abstract

A new method is proposed to improve the monitoring accuracy of the thin film thickness in the photoelectricity extremum method. By improving the accuracy of the interpretation points, the random errors occurred when film coating is stopped in the optical extremum method are avoided. The nonlinear relationship between the monitoring signals and the optical thickness is transformed into a linear one and the optimum starting time is deduced by the treatment with algorithms, which avoids the influence of the nonlinear errors on the discrimination of extreme value points in the process of the monitoring thin film deposition.

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中图分类号:O484.4

DOI:10.3788/lop55.103102

所属栏目:薄膜

基金项目:重庆市教育委员会科学技术研究资助项目(KJ1600934, KJ1500935)、重庆市科学技术委员会基础与前沿研究一般项目(cstc201jcyjA0497)、重庆理工大学科研启动基金(2017ZD20)

收稿日期:2018-04-08

修改稿日期:2018-04-26

网络出版日期:2018-05-09

作者单位    点击查看

庄秋慧:重庆理工大学机械工程学院, 重庆 400050
王三强:国网重庆市电力公司电力科学研究院, 重庆 401123

联系人作者:庄秋慧(zqh@cqut.edu.cn)

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引用该论文

Zhuang Qiuhui,Wang Sanqiang. Monitoring Method of Optical Film Thickness[J]. Laser & Optoelectronics Progress, 2018, 55(10): 103102

庄秋慧,王三强. 光学膜厚的监控方法[J]. 激光与光电子学进展, 2018, 55(10): 103102

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