中国激光, 2018, 45 (11): 1103001, 网络出版: 2018-11-15
基于腔内倍频的457 nm激光器高反射腔镜的研制 下载: 919次
Fabrication of High-Reflective Cavity Mirrors for 457 nm Laser Based on Intracavity Frequency Doubling
薄膜 腔面高反射膜 倍频反射 膜厚控制 最小二乘法 thin films high-reflective film on cavity surface frequency doubling reflection film-thickness control least square method
摘要
基于倍频反射膜的设计理论,结合膜系设计软件实现了多波段激光腔面高反射膜的设计。在制备过程中,基于最小二乘法原理建立了残余蒸镀量与膜层厚度之间的关系式,解决了膜厚控制误差累积导致薄膜光谱性能变差的问题。制备的薄膜在457 nm和914 nm波长处的反射率分别为99.9%和99.6%,在808,1064,1342 nm波长处的透射率分别为97.2%、96.8%和93.1%,满足457 nm激光器的使用要求。
Abstract
Based on the design theory of frequency doubling reflective films, the design of multi-band high-reflective films on laser cavity surface is realized with the film design software. In the fabrication process, the deterioration problem of the thin film spectral performance caused by the accumulation of the film thickness control error is solved based on the relationship between the residual evaporation amount and the film thickness established by the least square method. The reflectivity of the fabricated thin films at 457 nm and 914 nm is 99.9% and 99.6%, and the transmissivity at 808 nm, 1064 nm and 1342 nm is 97.2%, 96.8% and 93.1%, respectively, which satisfies the requirements of the 457 nm laser.
刘冬梅, 李五一, 付秀华, 张静, 张功. 基于腔内倍频的457 nm激光器高反射腔镜的研制[J]. 中国激光, 2018, 45(11): 1103001. Liu Dongmei, Li Wuyi, Fu Xiuhua, Zhang Jing, Zhang Gong. Fabrication of High-Reflective Cavity Mirrors for 457 nm Laser Based on Intracavity Frequency Doubling[J]. Chinese Journal of Lasers, 2018, 45(11): 1103001.