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自由曲面干涉仪中自适应零位补偿器间距标定

Spacing Calibration of Adaptive Null Compensator in Free Form Surface Interferometer

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摘要

研究了自适应补偿器(ANC)中两大补偿器——可变形镜(DM)和部分补偿镜之间的轴向距离标定技术,提出了一种多零位约束方法,利用一块校准镜,通过DM形变实现不同位置的零位检测,从而构建多个测量方程用以限制误差耦合,实现ANC空间间距自标定。通过仿真和实验验证了该标定方法的高精度。该方法摒弃了外部直接测量手段,使得ANC和整体干涉仪的集成化成为可能。

Abstract

The axial spacing calibration between the two big compensators, the deformable mirror (DM) and the partial null optics in the adaptive null compensator (ANC), is investigated. A multi-null constraint method is proposed, in which the deformation of the DM is used to acquire the null measurements at different positions with the help of a calibrating mirror. Thus the multiple measurement equations are constructed to constrain the error coupling and the self-calibration of spacing distance in ANC is realized. The high efficiency of this method is verified by simulations and experiments. The direct measurement way is discarded in this method, which makes the integration between ANC and the whole interferometer possible.

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中图分类号:TQ171.65

DOI:10.3788/cjl201845.1104005

所属栏目:测量与计量

基金项目:国家自然科学基金(61705002)、安徽省自然科学基金(1808085QF198)、中国科学院天文光学技术重点实验室开放课题(CAS-KLAOT-KF201704)

收稿日期:2018-06-05

修改稿日期:2018-07-06

网络出版日期:2018-07-24

作者单位    点击查看

张磊:安徽大学光电信息获取与控制教育部重点实验室, 安徽 合肥 230601
李东:中国工程物理研究院激光聚变研究中心, 四川 绵阳 621900
周胜:安徽大学光电信息获取与控制教育部重点实验室, 安徽 合肥 230601
李劲松:安徽大学光电信息获取与控制教育部重点实验室, 安徽 合肥 230601
俞本立:安徽大学光电信息获取与控制教育部重点实验室, 安徽 合肥 230601

联系人作者:张磊(optzl@ahu.edu.cn)

【1】Tricard M, Bajuk D. Practical examples of freeform optics[C]∥Freeform Optics. Optical Society of America, 2013: FT3B. 2.

【2】Pang Z H, Fan X W, Ma Z, et al. Free-form optical elements corrected aberrations of optical system[J]. Acta Optica Sinica, 2016, 36(5): 0522001.
庞志海, 樊学武, 马臻, 等. 自由曲面校正光学系统像差的研究[J]. 光学学报, 2016, 36(5): 0522001.

【3】Qian W, Yang B. Free-form reflector design for muti-direction collimated beam[J]. Laser & Optoelectronics Progress, 2016, 53(1): 012201.
钱伟, 杨波. 产生多向准直光束的自由曲面反光镜设计[J]. 激光与光电子学进展, 2016, 53(1): 012201.

【4】Zhang L, Liu D, Shi T, et al. Optical free-form surfaces testing technologies[J]. Chinese Journal of Optics, 2017, 10(3): 283-299.
张磊, 刘东, 师途, 等. 光学自由曲面面形检测技术[J]. 中国光学, 2017, 10(3): 283-299.

【5】Speck A, Zelzer B, Kannengieer M, et al. Inspection of freeform intraocular lens topography by phase measuring deflectometric methods[J]. Applied Optics, 2013, 52(18): 4279-4286.

【6】Su P, Wang Y H, Burge J H, et al. Non-null full field X-ray mirror metrology using SCOTS: a reflection deflectometry approach[J]. Optics Express, 2012, 20(11): 12393-12406.

【7】Wang D D, Zhang S, Wu R M, et al. Computer-aided high-accuracy testing of reflective surface with reverse Hartmann test[J]. Optics Express, 2016, 24(17): 19671-19681.

【8】Ghim Y S, Rhee H G, Davies A, et al. 3D surface mapping of freeform optics using wavelength scanning lateral shearing interferometry[J]. Optics Express, 2014, 22(5): 5098-5105.

【9】Hao Q, Wang S P, Hu Y, et al. Virtual interferometer calibration method of a non-null interferometer for freeform surface measurements[J]. Applied Optics, 2016, 55(35): 9992-10001.

【10】Li J, Shen H, Zhu R H, et al. Interferometry with flexible point source array for measuring complex freeform surface and its design algorithm[J]. Optics Communications, 2018, 417: 67-75.

【11】Offner A. A null corrector for paraboloidal mirrors[J]. Applied Optics, 1963, 2(2): 153-155.

【12】Wyant J C, Bennett V P. Using computer generated holograms to test aspheric wavefronts[J]. Applied Optics, 1972, 11(12): 2833-2839.

【13】Sullivan J J, Greivenkamp J E. Design of partial nulls for testing of fast aspheric surfaces[J]. Proceedings of SPIE, 2007, 6671: 66710W.

【14】Liu D, Yang Y, Luo Y J, et al. Non-null interferometric aspheric testing with partial null lens and reverse optimization[J]. Proceedings of SPIE, 2009, 74260: 74260.

【15】Zhang L. Optical free-form surface subaperture stitching interferometry[D]. Hangzhou: Zhejiang University, 2016.
张磊. 光学自由曲面子孔径拼接干涉检测技术[D]. 杭州: 浙江大学, 2016.

【16】Zhu D Y, Zhang X J. Design of high-precision phase computer-generated-hologram[J]. Acta Optica Sinica, 2015, 35(7): 0712002.
朱德燕, 张学军. 高精度相位型计算全息图的设计[J]. 光学学报, 2015, 35(7): 0712002.

【17】Huang Y, Ma J, Zhu R H, et al. Investigation of measurement uncertainty of optical freeform surface based on computer-generated hologram[J]. Acta Optica Sinica, 2015, 35(11): 1112007.
黄亚, 马骏, 朱日宏, 等. 基于计算全息的光学自由曲面测量不确定度分析[J]. 光学学报, 2015, 35(11): 1112007.

【18】Hou X, Wu F, Yang L, et al. Experimental study on measurement of aspheric surface shape with complementary annular subaperture interferometric method[J]. Optics Express, 2007, 15(20): 12890-12899.

【19】Chen S Y, Li S Y, Dai Y F, et al. Experimental study on subaperture testing with iterative stitching algorithm[J]. Optics Express, 2008, 16(7): 4760-4765.

【20】Wang X, Wang L, Yin L, et al. Measurement of large aspheric surfaces by annular subaperture stitching interferometry[J]. Chinese Optics Letters, 2007, 5(11): 645-647.

【21】Zhang L, Liu D, Shi T, et al. Aspheric subaperture stitching based on system modeling[J]. Optics Express, 2015, 23(15): 19176-19188.

【22】Pruss C, Tiziani H J. Dynamic null lens for aspheric testing using a membrane mirror[J]. Optics Communications, 2004, 233(1/2/3): 15-19.

【23】Fuerschbach K, Thompson K P, Rolland J P. Interferometric measurement of a concave, φ-polynomial, Zernike mirror[J]. Optics Letters, 2014, 39(1): 18-21.

【24】Huang L, Choi H, Zhao W C, et al. Adaptive interferometric null testing for unknown freeform optics metrology[J]. Optics Letters, 2016, 41(23): 5539-5542.

【25】Zhang L, Zhou S, Li D, et al. Pure adaptive interferometer for free form surfaces metrology[J]. Optics Express, 2018, 26(7): 7888-7898.

引用该论文

Zhang Lei,Li Dong,Zhou Sheng,Li Jingsong,Yu Benli. Spacing Calibration of Adaptive Null Compensator in Free Form Surface Interferometer[J]. Chinese Journal of Lasers, 2018, 45(11): 1104005

张磊,李东,周胜,李劲松,俞本立. 自由曲面干涉仪中自适应零位补偿器间距标定[J]. 中国激光, 2018, 45(11): 1104005

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