光学学报, 2018, 38 (11): 1130002, 网络出版: 2019-05-09
中空型平板波导红外光谱仪的波长定标 下载: 689次
Wavelength Calibration of Infrared Spectrometer Based on Hollow Planar Waveguide
光谱学 小型红外光谱仪 平板波导 波长定标 激光器 spectroscopy miniature infrared spectrometer hollow planar waveguide wavelength calibration lasers
摘要
为了实现中空型平板波导小型红外光谱仪光谱数据的定量化,在分析实验室常用波长定标方法的基础上,搭建了一种基于CO2激光器+积分球的波长定标装置。该装置的光谱定标范围宽,且具有较高的分辨率,克服了传统实验室定标方法的缺点,提高了定标精度。首先介绍了中空型平板波导红外光谱仪的工作原理,接着利用该定标装置对光谱仪进行波长定标,然后采用多项式拟合算法完成定标数据的分析,最后通过对两片窄带滤光片的测量完成定标结果的验证。实验结果表明:采用CO2激光器+积分球组合的方式得到的波长定标方程,其中心波长定标误差不超过0.02 μm,光谱分辨率可达144 nm。
Abstract
In order to quantify the spectral data of a miniature infrared spectrometer based on hollow planar waveguide, we built a wavelength calibration device based on carbon dioxide (CO2) laser and integrating sphere on the basis of analyzing the common wavelength calibration method used in the laboratory. The spectrum calibration range of the device is wide and the resolution is high, which overcomes the shortage of traditional laboratory calibration methods and improves the calibration precision. We first introduce the working principle of the infrared spectrometer based on hollow planar waveguide, then use the calibration device to calibrate the wavelength of the spectrometer, and then complete the calibration data analysis by the polynomial fitting algorithm. Finally, the calibration results are verified by the measurement of two narrow band filters. The experimental results show that the calibration error of the central wavelength is not more than 0.02 μm and the spectral resolution can reach 144 nm by using the combination of CO2 laser and integrating sphere.
吴越, 刘家祥, 方勇华, 杨敏. 中空型平板波导红外光谱仪的波长定标[J]. 光学学报, 2018, 38(11): 1130002. Yue Wu, Jiaxiang Liu, Yonghua Fang, Min Yang. Wavelength Calibration of Infrared Spectrometer Based on Hollow Planar Waveguide[J]. Acta Optica Sinica, 2018, 38(11): 1130002.