研制了一套以数字信号处理 (DSP)芯片为控制器的一维纳米定位控制系统。该系统主要由驱动平台、微型迈克尔逊干涉仪、DSP控制器等三个模块组成。其中驱动平台模块由线性滑轨、超声波马达HR4和驱动器AB2组成。HR4配合其专用驱动器AB2利用摩擦力来驱动侧面贴有陶瓷片的线性滑轨, 微型迈克尔逊干涉仪用来感测滑轨的位移。基于BP神经网络的PID控制算法和迈克尔逊干涉仪的信号处理运算全部由DSP控制器完成。实验结果表明, 该定位系统行程为20 mm, 定位精度优于10 nm, 重复定位标准偏差为7 nm。该定位系统具有系统架构简单, 定位精度高等优点, 可用于大行程高精度定位应用场合。

A one-dimensional nano-positioning control system based on a controller using DSP (Digital signal processor) chip was developed. The system was mainly composed of a driving stage, a miniature Michelson interferometer and a DSP controller. The driving stage module included a linear stage, an ultrasonic motor HR4 and a motor driver AB2. The HR4 and AB2 were used to drive the ceramic strip adhered to the side of the linear stage by friction. The miniature Michelson interferometer was used to detect the displacement of the stage. Both the PID control algorithm based on BP neural network and the signal processing of the Michelson interferometer were finished by the DSP controller. The experimental results show that the positioning accuracy of the nano-positioning system is better than 10 nm within 20 mm range, and the standard deviation of repeated positioning is 7 nm. The positioning system has the advantages of simple structure, high positioning accuracy, and can be used on the occasion of high-precision positioning.