疲劳效应是诱导高功率固体激光装置中光学元件激光损伤的因素之一, 目前对SiO2化学增透膜激光诱导疲劳损伤的研究鲜见报道。基于此, 本文采用单一激光能量多发次辐照和多梯度激光能量多发次辐照两种不同的激光辐照方式, 研究1064 nm化学增透膜层的激光疲劳损伤效应及特征。研究结果表明, 在单一激光能量多发次脉冲激光辐照下, 膜层最易发生疲劳损伤; 采用多梯度激光能量多发次辐照的方式, 可以有效地提升膜层的损伤阈值, 进而提升膜层的抗激光疲劳损伤性能。

Fatigue effect is one of the factors leading to the damage of chemical film on optical components in high power laser system. However, few attentions are given on this issue. In this work, two irradiation types, single fluences with multi-shots and multi-gradient fluence with multi-shots, are utilized to investigate the characteristics and effect of laser fatigue damage on antireflection film at 1064 nm. The results indicate that fatigue damage is easy to occur on film under multi-shot laser irradiation. While the damage threshold and the resistance of fatigue effect can be effectively improved at the multi-gradient fluence with multi-shots. The results can provide references on methods and technique to improve the resistance ability and resist the fatigue damage of film.