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射流抛光中抛光液黏度对材料去除函数的影响

Influence of Polishing Slurry Viscosity on the Material Removal Function for Fluid Jet Polishing

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摘要

抛光液黏度是影响射流抛光(FJP)效果的重要因素,针对硬脆光学元件射流抛光中对抛光液黏度缺乏系统研究的现状,研究了抛光液黏度变化对材料去除函数的影响。建立射流抛光连续相、离散相模型和磨损模型,计算不同黏度下磨粒运动轨迹,分析磨料颗粒撞击速度矢量随黏度的变化规律。配置不同黏度相同质量分数的抛光液,结合BK7工件静态采斑实验研究与塑性磨损理论计算,获得不同黏度下的材料去除函数,分析黏度对去除函数的影响机制,并进一步研究由此引起的工件表面粗糙度变化。结果表明:随着抛光液黏度增大,材料去除函数的去除深度减小、去除形状及去除范围保持不变,这有利于降低工件表面粗糙度。该研究扩展了现有光学元件射流抛光材料去除理论,对实际抛光液黏度调控具有理论指导意义。

Abstract

The viscosity of the polishing slurry is an important parameter during the fluid jet polishing (FJP) of optical elements. Polishing slurry viscosity in the FJP of hard and brittle optical components has not been extensively investigated. This study therefore investigates the influence of viscosity on the material removal function in the FJP process. The physical models of continuous-phase, discrete-phase, and erosion processes are also proposed for FJP. Pathlines of abrasive particles with different viscosities are calculated, and the variation rule of impact velocity vector of abrasive particles with viscosity is analyzed. Using the polishing slurries with different viscosities but the same mass fraction, the effect of viscosity on material removal function is obtained by combining the static mining-spot experiment with plastic-wear theory for a BK7 optical glass workpiece. The influence of viscosity on the material removal function and the influence on the surface roughness after uniform polishing are evaluated. The results indicate that as the slurry viscosity increases, the form of the material removal function and the material removal range remain the same, whereas the material removal depth decreases exponentially and the surface roughness of the optical elements is improved. Results of this study expand the knowledge of FJP material removal mechanisms and have theoretical significance regarding the control of polishing slurry viscosity.

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中图分类号:TH162.1

DOI:10.3788/aos201838.1222003

所属栏目:光学设计与制造

基金项目:国家自然科学基金 (61605181)、中国物理研究院超精密加工重点实验室基金(ZZ15002)

收稿日期:2018-06-04

修改稿日期:2018-07-11

网络出版日期:2018-07-27

作者单位    点击查看

孙鹏飞:中国工程物理研究院机械制造工艺研究所, 四川 绵阳 621000
张连新:中国工程物理研究院机械制造工艺研究所, 四川 绵阳 621000
李建:中国工程物理研究院机械制造工艺研究所, 四川 绵阳 621000
王中昱:中国工程物理研究院机械制造工艺研究所, 四川 绵阳 621000
周涛:中国工程物理研究院机械制造工艺研究所, 四川 绵阳 621000

联系人作者:联系作者(pfsun2016@163.com)

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引用该论文

Sun Pengfei,Zhang Lianxin,Li Jian,Wang Zhongyu,Zhou Tao. Influence of Polishing Slurry Viscosity on the Material Removal Function for Fluid Jet Polishing[J]. Acta Optica Sinica, 2018, 38(12): 1222003

孙鹏飞,张连新,李建,王中昱,周涛. 射流抛光中抛光液黏度对材料去除函数的影响[J]. 光学学报, 2018, 38(12): 1222003

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