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红外热成像甲烷探测系统的双通带滤波器

Dual-Bandpass Filter in Infrared Thermal Imaging System for Methane Detection

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摘要

基于甲烷的红外吸收光谱,通过光谱拆分法实现了一种双通带滤波器的设计。通过调节离子源束流,改善了ZnS膜层的折射率,消除了背景噪声。通过引入可控薄层,降低了非周期窄带通膜系的制备难度。经实验测试与分析,所研制的双通带滤波器在3.31 μm和7.67 μm的透射率分别为89.25%、81.97%,达到了提高探测系统灵敏度的目的。

Abstract

Based on the infrared absorption spectrum of methane, a dual-bandpass filter is designed by the spectral splitting. With the adjustment of ion source beams, the refractive index of the ZnS film layer is improved and the background noise is eliminated. The fabrication difficulty of aperiodic narrow-bandpass filter films is reduced by the introduction of controllable thin film layers. The experimental test and analysis show that the prepared dual-bandpass filter possesses the transmissivity of 89.25% at 3.31 μm and 81.97% at 7.67 μm, respectively, and the goal for improving the sensitivity of detecting systems is achieved.

Newport宣传-MKS新实验室计划
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中图分类号:O484

DOI:10.3788/aos201838.1231001

所属栏目:薄膜

基金项目:吉林省重大科技攻关专项(20140203002GX)

收稿日期:2018-06-22

修改稿日期:2018-07-06

网络出版日期:2018-07-12

作者单位    点击查看

付秀华:长春理工大学光电工程学院, 吉林 长春 130022
刘文奇:长春理工大学光电工程学院, 吉林 长春 130022
尹士平:广东先导先进材料股份有限公司, 广东 清远 511517
刘克武:广东先导先进材料股份有限公司, 广东 清远 511517
刘冬梅:长春理工大学光电工程学院, 吉林 长春 130022

联系人作者:刘文奇(lwq_optics@126.com); 付秀华(goptics@126.com);

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引用该论文

Fu Xiuhua,Liu Wenqi,Yin Shiping,Liu Kewu,Liu Dongmei. Dual-Bandpass Filter in Infrared Thermal Imaging System for Methane Detection[J]. Acta Optica Sinica, 2018, 38(12): 1231001

付秀华,刘文奇,尹士平,刘克武,刘冬梅. 红外热成像甲烷探测系统的双通带滤波器[J]. 光学学报, 2018, 38(12): 1231001

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