为了满足MEMS火工品的小型化、集成化和低能发火等要求, 本文基于MEMS技术, 设计了一种平面“蛇”形结构的薄膜换能元, 采用磁控溅射等MEMS薄膜制作技术, 完成了不同薄膜桥区电阻和基底材料薄膜换能元样品的制备, 采用扫描电镜(SEM)、原子力显微镜(AFM), 低电阻测试仪、红外热像仪等设备, 完成了不同换能元样品结构(薄膜桥区线宽、长度及厚度等)及性能(电阻、电热响应等)参数的测试与表征。通过分析研究, 获得了薄膜桥区电阻材料、基底材料、薄膜厚度以及桥区结构形状对换能元性能的影响规律, 优选确定以金属Pt和7740玻璃作为换能元电阻及基底材料, 发火性能达5 V/33 μF, 满足MEMS火工品的低能化要求。

In order to meet the requirements of miniaturization, integration, and low energy of MEMS initiators, based on MEMS technology, a planar film structure energy conversion component with a “snake-shape” was designed. Using magnetic sputtering and other MEMS production technologies, we prepared energy conversion components with different resistive and base materials. Then, using scanning electron microscopy (SEM), atomic force microscopy (AFM), a low resistance tester, an infrared thermal imager, and other equipment, we obtained the characterization parameters and the performance of different element samples (such as the width, length, and thickness of the film bridge area and the resistance, electro-thermal response, etc.). Through analysis and study, the influences of the resistive material, base material, thickness of the film, and bridge shape with the performance of the energy conversion component were obtained; metal Pt and 7740 glass was preferred, which ignite at 5 V/33 μF, and meet the low-energy requirements of MEMS initiators.