设计了一种具有类电磁诱导透明(EIT)效应的高Q值太赫兹超材料。该结构单元由上下平行的双金属线及中间垂直的单金属线组成。分别对单金属线、双金属线及组合结构进行仿真，分析了组合结构中金属线的位置和尺寸对透射率及品质因数Q的影响。结果表明，随着单金属线的水平移动产生了类EIT效应，透射率和Q值随着偏移距离的增大而发生变化，通过调整结构和尺寸可以实现不同Q值。通过优化，当偏移距离为8 μm 时，在0.73 THz 附近得到一个3 dB带宽约为11.56 GHz的透明窗，相应的Q值为63.09，其透射率为0.50。最后，对谐振器的传感特性进行了测量，其折射率灵敏度为60.69 GHz/RIU，FOM值为5.25/RIU，具有优异的传感特性。

A high Q-factor terahertz metamaterial with analog of electromagnetically induced transparency (EIT) effect is designed. The structural unit is composed of double metal wires parallel to each other and a vertical single metal wire in the middle. The single wire, double wires and composite structures are simulated respectively, and the influence of the position and size of the metal wires on the transmittance and quality factor Q of the composite structure is analyzed. The results show that the EIT-like effect occurs with the horizontal shift of the single metal wire and the transmittance and the Q-factor are changed with the increase of the offset distance. Moreover, different Q-factor can be achieved by adjusting the structure and size. By optimization, when the offset distance is 8 μm, a transparent window with 3 dB bandwidth of approximate 11.56 GHz is obtained near 0.73 THz. The corresponding Q-factor is 63.09 and the transmittance is 0.50. Finally, the sensing characteristics of the resonator is measured, showing excellent sensing performance. The refractive index sensitivity is 60.69 GHz/RIU, and FOM value is 5.25/RIU.