基于球面化成像算法, 提出了一种微通道板微尺度形变检测的方法.首先通过数学推演建立了图像球面化模型; 然后以直线图像为标准图, 对微通道板的形变做了成像模拟测试, 解释了微通道板像旋转现象的产生机理; 最后, 根据模拟数据和扫描电子显微镜测量所得的形变结果, 提出了双线形变检测方案,设计了检测仪器并制定了检测标准.光干涉仪的实际测量结果表明微通道板的实际形貌与模拟结果相符.当两条垂直直线在微通道板上的反射像的旋转夹角超过40°时该板被认为是不合格品; 当旋转夹角小于7°时则被认为符合国军标中的平面度标准.该方法的测量精度可达1 μm, 已被应用于微通道板生产过程中.

An image spherizing algorithm-baesd deformation detecting method for micro-channel plate is proposed. A rigorous mathematical deduction on image spherizing model is described in detail, subsequently a straight line image is chosen as standard picture and the imaging simulated test for deformed micro-channel plate is performed. According to the simulated results, the mechanism of image twisting phenomenon is described. At last, the deformation detection scheme of double lines method is proposed. The experimental set-up is designed and the detection standard is defined based on the simulated data and the planeness of micro-channel plate that measured by scanning electron microscope. The experimental result which obtained by interferometer showed that the actual profile characteristics of deformed micro-channel plate is consistent with the theoretical analysis. A micro-channel plate will be treat as defective product when the rotation angle of two orthogonal lines in the reflected image on the surface of micro-channel plate is greater than 40°, whereas the product will meet the military standard when the rotation angle is smaller than 7°. The accuracy of the proposed method can reach 1 μm and it has been applied to the production process of micro-channel plate.