光电工程, 2018, 45 (12): 180198, 网络出版: 2018-12-18  

扫描电子显微镜图像漂移的实时矫正方法

Real-time correction of image drift in scanning electron microscope
作者单位
1 苏州大学机器人与微系统研究中心,江苏 苏州 215021
2 苏州纳米科技协同创新中心,江苏 苏州 215021
摘要
为解决扫描电子显微镜(SEM)由于电子束漂移、电磁干扰等原因导致的图像漂移问题,提出基于ORB 结合PROSAC 的图像漂移矫正算法。首先采用ORB 算法对基准图像和实时图像进行特征检测,然后利用汉明距离与交叉匹配实现特征的初匹配,再结合RANSAC 的优化算法PROSAC 计算帧间的单应矩阵,利用单应矩阵映射剔除外点后重新迭代计算出最终的精确单应矩阵,最后利用单应矩阵的透视变换实现SEM 图像漂移实时矫正。通过实验证明,该算法不仅精度高,而且能够满足SEM 实时处理的要求。
Abstract
In order to solve the problem of imaging drift in scanning electron microscope (SEM) that caused by electron beam drift, electromagnetic interference and other reasons, an image shift correction algorithm based on ORB (oriented FAST and rotated BRIEF) combing the PROSAC (progressive sample consensus) is proposed in this paper. Firstly, the ORB algorithm is used to detect the feature between the reference image and real-time image. Then the initial matching of the feature is implemented by using the Hamming distance and cross-matching. Moreover, the RANSAN (random sample consensus) optimization algorithm PROSAC is used to calculate the homography matrix between frames and the final exact homography matrix is re-iterated after eliminating exterior point. Finally, the SEM image drift is corrected in real time using the perspective transformation of the homography matrix. The experiments show that the proposed algorithm is high precision and satisfies the requirement of SEM real-time processing.

徐伟, 谷森, 储成智, 靳振伟, 汝长海. 扫描电子显微镜图像漂移的实时矫正方法[J]. 光电工程, 2018, 45(12): 180198. Xu Wei, Gu Sen, Chu Chengzhi, Jin Zhenwei, Ru Changhai. Real-time correction of image drift in scanning electron microscope[J]. Opto-Electronic Engineering, 2018, 45(12): 180198.

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