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Fabrication and properties of high quality InGaN-based LEDs with highly reflective nanoporous GaN mirrors

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Abstract

Distributed Bragg reflectors (DBRs) are essential components for the development of optoelectronic devices. In this paper, we first report the use of the nanoporous GaN (NP-GaN) DBR as a template for regrowth of InGaN-based light-emitting diodes (LEDs). The wafer-scale NP-GaN DBR, which is fabricated by electrochemical etching in a neutral solution, has a smooth surface, high reflectivity (>99.5%), and wide spectral stop band width (>70 nm). The chemical composition of the regrown LED thin film is similar to that of the reference LED, but the photoluminescence (PL) lifetime, PL intensity, and electroluminescence intensity of the LED with the DBR are enhanced several times compared to those of the reference LED. The intensity enhancement is attributed to the light reflection effect of the NP-GaN DBR and improved crystalline quality as a result of the etching scheme, whereas the enhancement of PL lifetime is attributable to the latter.

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DOI:10.1364/prj.6.001144

基金项目:National Natural Science Foundation of China (NSFC)10.13039/501100001809 (61376069, 11775134); Key Research and Development Plan of Shandong Province, China (2018GGX102024, 2018GGX102014).

收稿日期:2018-06-11

录用日期:2018-09-16

网络出版日期:2018-10-25

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Dezhong Cao:School of Microelectronics, Shandong University, Jinan 250100, ChinaSchool of Science, Xi’an Polytechnic University, Xi’an 710048, ChinaSchool of Physics, State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, China
Xiaokun Yang:School of Microelectronics, Shandong University, Jinan 250100, China
Lüyang Shen:School of Microelectronics, Shandong University, Jinan 250100, China
Chongchong Zhao:School of Microelectronics, Shandong University, Jinan 250100, China
Caina Luan:School of Microelectronics, Shandong University, Jinan 250100, China
Jin Ma:School of Microelectronics, Shandong University, Jinan 250100, China
Hongdi Xiao:School of Microelectronics, Shandong University, Jinan 250100, China

联系人作者:Hongdi Xiao(hdxiao@sdu.edu.cn)

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引用该论文

Dezhong Cao, Xiaokun Yang, Lüyang Shen, Chongchong Zhao, Caina Luan, Jin Ma, and Hongdi Xiao, "Fabrication and properties of high quality InGaN-based LEDs with highly reflective nanoporous GaN mirrors," Photonics Research 6(12), 1144-1150 (2018)

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