对熔石英材料的光学特性进行研究, 利用分光光度计得到了不同波长下元件的光透过率、吸收率及其变化规律。通过熔石英材料纳米压痕实验, 研究了熔石英材料的机械特性, 得到了熔石英晶体的弹性模量和材料硬度。研究了熔石英材料的断裂特性, 分析熔石英光学元件超精密加工亚表层损伤形成机理, 对亚表层损伤裂纹的结构、组成以及裂纹扩散的形成过程进行了分析和研究。利用纳米压痕实验, 模拟研磨加工时, 材料表面受单颗粒磨粒静态压印和动态冲击时形貌演变的过程, 得到了维氏硬度、断裂韧性及临界压力载荷。

To investigate the optical characteristics of fused silica material, the spectrophotometer was used to obtain the evolution of light transmission rate and absorptivity with respect to laser wavelength. Through nano-indentation experiments, the mechanical properties of fused silica were investigated that both the elastic modulus and hardness of fused silica material were obtained. The forming mechanisms of subsurface damage on high-precision finished fused silica components were analyzed by considering the material fracture properties. The structure, composition and crack forming process of subsurface damage were investigated as well. Based on the nano-indentation experiments, the Vickers hardness, fracture toughness and critical pressure load of fused silica were obtained by modeling the surface morphology evolution of fused silica under static stamping and dynamic impact, which were caused by single abrasive grain in the actual grinding process.