首页 > 论文 > 强激光与粒子束 > 30卷 > 12期(pp:129001--1)

基于光场调制的纳秒激光图案化石墨烯研究

Patterning of graphene by light field modulated nanosecond laser

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

激光加工技术在石墨烯制备领域得到了许多应用。目前激光图案化石墨烯的方法多为激光逐点扫描, 而单次辐照实现图案化加工的方法鲜有报道。通过间光调制器改变激光的光场, 使光束聚焦成图案, 单次辐照直接在石墨烯样品上烧蚀实现图案化。控制激光能量为合适的值时可将石墨烯清晰地图案化而不损伤硅基底。通过拉曼光谱扫描成像发现石墨烯加工边缘清晰, 精度达到μm量级, 具有加工速度快、无需移动样品等特点。

Abstract

Laser-based approaches for graphene synthesis, reduction, modification, cutting and micro-patterning have been developed and applied to the fabrication of various electronic devices. General method utilized in direct laser writing and patterning of graphene was realized by controlling the movement of the sample or the laser reflecting mirror, while patterning by single shot laser is rarely reported. In the present study, a single shot laser patterning graphene method via light field modulating is proposed. Via controlling the light field by special light modulator (SLM), nanosecond laser pulses focused by objective lens were modulated to the desired pattern. The 4 layer graphene in the laser irradiate region was damaged when laser energy was lager than 0.03 mJ. When the laser energy reached 0.06 mJ, clear pattern formed in graphene while no damage occurred in silicon base. The characteristics of graphene patterns were measured using Raman spectra imaging technology. The experimental results revealed that the light field modulated nanosecond laser remains potentially advantageous in graphene micro pattern processing with no need of moving the sample, quick processing and micrometer precision.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:O469

DOI:10.11884/hplpb201830.180154

所属栏目:激光与粒子束技术应用

基金项目:中国工程物理研究院高能激光科学与技术实验室项目(2018HEL-16)

收稿日期:2018-06-01

修改稿日期:2018-11-12

网络出版日期:--

作者单位    点击查看

李阳龙:中国工程物理研究院 流体物理研究所, 四川 绵阳 621900中国工程物理研究院 高能激光科学与技术重点实验室, 四川 绵阳 621900
吴凌远:中国工程物理研究院 流体物理研究所, 四川 绵阳 621900中国工程物理研究院 高能激光科学与技术重点实验室, 四川 绵阳 621900
沈欢欢:中国工程物理研究院 流体物理研究所, 四川 绵阳 621900中国工程物理研究院 高能激光科学与技术重点实验室, 四川 绵阳 621900
刘国栋:中国工程物理研究院 流体物理研究所, 四川 绵阳 621900中国工程物理研究院 高能激光科学与技术重点实验室, 四川 绵阳 621900
王伟平:中国工程物理研究院 流体物理研究所, 四川 绵阳 621900中国工程物理研究院 高能激光科学与技术重点实验室, 四川 绵阳 621900

联系人作者:李阳龙(jesseliy@163.com)

备注:李阳龙(1984-), 男, 博士生, 主要从事激光与物质相互作用研究。

【1】Novoselov K S, Geim A K, Morozov S V, et al. Electric field effect in atomically thin carbon films[J]. Science, 2004, 306(22): 666-669.

【2】Morozov S V, Novoselov K S, Katsnelson M I, et al. Giant intrinsic carrier mobilities in graphene and its bilayer[J]. Phys Rev Lett, 2008, 100: 016602.

【3】Nair R R, Blake P, Grigorenko A N, et al. Fine structure constant defines visual transparency of graphene[J]. Science, 2008, 321(6): 1308.

【4】Lee C, Wei X, Kysar J W, et al. Measurement of the elastic properties and intrinsic strength of monolayer graphene[J]. Science, 2008, 321(18): 385-388.

【5】Krauss B, Lohmann T, Chae D H, et al. Laser-induced disassembly of a graphene single crystal into a nanocrystalline network[J]. Phys Rev B, 2009, 79: 165428.

【6】Qian M, Zhou Y S, Gao Y, et al. Formation of graphene sheets through laser exfoliation of highly ordered pyrolytic graphite[J]. Appl Phys Lett, 2011, 98: 173108.

【7】Lee S, Toney M F, Ko W, et al. Laser-synthesized epitaxial graphene[J]. ACS Nano, 2010, 4(12): 7524-7530.

【8】Park J B, Xiong W, Gao Y, et al. Fast growth of graphene patterns by laser direct writing[J]. Appl Phys Lett, 2011, 98: 123109.

【9】Huang L, Liu Y, Ji L C, et al. Pulsed laser assisted reduction of graphene oxide[J]. Carbon, 2011, 49(7): 2431-2436.

【10】Roberts A, Cormode D, Reynolds C, et al. Response of graphene to femtosecond high-intensity laser irradiation[J]. Appl Phys Lett, 2011, 99: 051912.

【11】Zhou Y, Bao Q L, Varghese B N, et al. Microstructuring of graphene oxide nanosheets using direct laser writing[J]. Adv Mater, 2010, 22(1): 67-71.

【12】吴凌远, 李阳龙, 刘国栋, 等.1064 nm纳秒激光对石墨烯的损伤效应研究[J].强激光与粒子束, 2015, 27: 081009.(Wu Lingyuan, Li Yanglong, Liu Guodong, et al. 1064 nm nanosecond laser induced damage effect on graphene. High Power Laser and Particle Beams, 2015, 27: 081009)

【13】Jani K, Christian B, Yigal L, et al. Toward two-dimensional all-carbon heterostructures via ion beam patterning of single-layer graphene[J]. Nano Lett, 2015, 15(9): 5944-5949.

【14】Chen Y, Zhang N, Li Y F, et al. Microscal E-patterned graphene electrodes for organic light-emitting devices by a simple patterning strategy[J]. Adv Optical Mater, 2018, 13: 1701348.

【15】Ethan B S, Pradyumna L P, Kanan P, et al. Inkjet printing of high conductivity, flexible graphene patterns[J]. J Phys Chem Lett, 2013, 4(8): 1347-1351.

【16】南洋, 张建寰, 张陈涛.激光直写制备石墨烯研究进展[J].化工新型材料, 2015, 43(12): 1-3.(Nan Yang, Zhang Jianhuan, Zhang Chentao. Progress in laser direct writing synthesis of graphene. New Chemical Materials. 2015, 43(12): 1-3)

【17】Chen H Y, Han D D, Tian Y, et al. Mask-free and programmable patterning of graphene by ultrafast laserdirect writing[J]. Chemical Physics, 2014, 430: 13-17.

【18】Chang T L, Chen Z C, Chen W Y, et al. Patterning of multilayer graphene on glass substrate by using ultraviolet picosecond laser pulses[J]. Microelectronic Engineering, 2016, 158(1): 1-5.

【19】Lee K, Ki H. Fabrication and optimization of transparent conductive films using laser annealing and picosecond laser patterning[J]. Applied Surface Science, 2017, 420(1): 886-895.

【20】Pechlivani E M, Papas D, Mekeridis C, et al. Ultra-short pulse laser for patterning high quality graphene electrodes[J]. Materials Today: Proceedings, 2017, 4(4): 5074-5081.

【21】Kumar R, Singh R K, Singh D P, et al. Laser-assisted synthesis, reduction and micro-patterning of graphene: Recent progress and applications[J]. Coordination Chemistry Reviews, 2017, 342: 34-79.

引用该论文

Li Yanglong,Wu Lingyuan,Shen Huanhuan,Liu Guodong,Wang Weiping. Patterning of graphene by light field modulated nanosecond laser[J]. High Power Laser and Particle Beams, 2018, 30(12): 129001

李阳龙,吴凌远,沈欢欢,刘国栋,王伟平. 基于光场调制的纳秒激光图案化石墨烯研究[J]. 强激光与粒子束, 2018, 30(12): 129001

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF