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飞秒激光作用下金膜的微观特性变化

Microscopic Properties Changes of Au Film Under Action of Femtosecond Laser

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摘要

用磁控溅射的方法在石英基底上制备了金(Au)膜,研究了Au膜在近激光损伤阈值(LIDT)飞秒脉冲激光辐照下的物相结构和表面形貌。结果表明:所制备的Au膜为(111)面取向生长的薄膜;近LIDT的激光辐照使辐照区的Au膜形成大晶粒,并由(111)单一取向变为多晶结构;Au膜晶粒尺寸的增大会导致表面粗糙度增加。实验结果为明确Au膜在飞秒激光作用下的损伤过程及后期应用提供了依据。

Abstract

Au films are deposited on fused silica substrates using the magnetron sputtering technique. The phase structure and surface morphology of the Au film after femtosecond pulse laser irradiation near laser induced damage threshold (LIDT) are investigated. The results show that the Au film prepared by magnetron sputtering is (111) oriented growth film. Laser irradiation energy near LIDT causes Au film to form large grains in the irradiated area and become polycrystalline structure from (111) single orientation. The increase of grain size leads to the increase of surface roughness. The experimental results provide a certain basis for exploring the damage process and later application of Au film under femtosecond laser.

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中图分类号:O436

DOI:10.3788/cjl201946.0203001

所属栏目:材料与薄膜

基金项目:中国科学院战略性先导科技专项B类(XDB1603)

收稿日期:2018-07-13

修改稿日期:2018-08-22

网络出版日期:2018-10-24

作者单位    点击查看

崔云:中国科学院上海光学精密机械研究所强激光材料重点实验室薄膜光学实验室, 上海 201800
张晗宇:中国科学院上海光学精密机械研究所强激光材料重点实验室薄膜光学实验室, 上海 201800
赵元安:中国科学院上海光学精密机械研究所强激光材料重点实验室薄膜光学实验室, 上海 201800
晋云霞:中国科学院上海光学精密机械研究所强激光材料重点实验室薄膜光学实验室, 上海 201800
朱美萍:中国科学院上海光学精密机械研究所强激光材料重点实验室薄膜光学实验室, 上海 201800
邵建达:中国科学院上海光学精密机械研究所强激光材料重点实验室薄膜光学实验室, 上海 201800

联系人作者:崔云(cuiyun@siom.ac.cn); 邵建达(jdshao@mail.shcnc.ac.cn);

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引用该论文

Cui Yun,Zhang Hanyu,Zhao Yuan′an,Jin Yunxia,Zhu Meiping,Shao Jianda. Microscopic Properties Changes of Au Film Under Action of Femtosecond Laser[J]. Chinese Journal of Lasers, 2019, 46(2): 0203001

崔云,张晗宇,赵元安,晋云霞,朱美萍,邵建达. 飞秒激光作用下金膜的微观特性变化[J]. 中国激光, 2019, 46(2): 0203001

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