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高精度位移测量系统的硬件在环仿真

Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System

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摘要

设计了一个基于二维光栅的高精度位置测量系统的硬件在环仿真平台,分析了测量模型在编程过程中产生误差的原因,并使用该仿真平台测试了模型的精度和运算时间。结果表明,当计算频率为20 kHz时,测量模型的编程精度优于0.79 nm,测量机箱引起的误差为8.84×10-7 nm。该仿真平台能够有效地检测基于二维光栅的测量模型在编程过程中产生的误差,并测试模型运算时间。

Abstract

A hardware-in-the-loop simulation platform for high-precision position measurement system based on two-dimensional grating is designed. The reasons for the error of the measurement model in the programming process are analyzed, and the simulation platform is used to test the accuracy and operation time of the measurement model. The results show that the accuracy of the measurement model is better than 0.79 nm when the calculated frequency is 20 kHz, and the error caused by simulation platform is 8.84×10-7 nm. The simulation platform can effectively detect the errors generated by the measurement model based on the two-dimensional grating in the process of program realization, and test the operation time of the model.

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中图分类号:TH822

DOI:10.3788/cjl201946.0204001

所属栏目:测量与计量

基金项目:国家科技重大专项(2017ZX02101007-003)

收稿日期:2018-08-14

修改稿日期:2018-10-16

网络出版日期:2018-10-24

作者单位    点击查看

张文涛:桂林电子科技大学电子工程与自动化学院, 广西 桂林 541004
杜浩:桂林电子科技大学电子工程与自动化学院, 广西 桂林 541004上海微电子装备(集团)股份有限公司, 上海 201203
熊显名:桂林电子科技大学电子工程与自动化学院, 广西 桂林 541004
谢仁飚:上海微电子装备(集团)股份有限公司, 上海 201203
王献英:上海微电子装备(集团)股份有限公司, 上海 201203

联系人作者:张文涛(glietzwt@163.com)

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引用该论文

Zhang Wentao,Du Hao,Xiong Xianming,Xie Renbiao,Wang Xianying. Hardware-in-the-Loop Simulation of High Precision Displacement Measurement System[J]. Chinese Journal of Lasers, 2019, 46(2): 0204001

张文涛,杜浩,熊显名,谢仁飚,王献英. 高精度位移测量系统的硬件在环仿真[J]. 中国激光, 2019, 46(2): 0204001

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