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飞秒激光等离子体光斑图像增强及亮度分析

Image Enhancement and Luminance Analysis of Femtosecond Laser Induced Plasma Spot

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摘要

飞秒激光加工单晶硅材料过程中会伴随产生等离子体,通过CCD相机采集等离子体的光辐射信号得到等离子体光斑图像。针对光斑图像边缘与背景区域对比度不明显、信噪比低的特点,对光斑图像进行增强处理,并进一步对光斑图像亮度特征进行分析。首先,对原始光斑图像进行滤波,采用主成分分析方法将其增强,对得到的第一主成分图像进行伪彩色处理,以便于分析其能量分布,并依据其能量分布信息将光斑的核心区域分割出来。其次,分别计算原始光斑图像的质心、长轴以及核心烧蚀区的质心与长短轴,分析图像的几何特征,据此判断激光烧蚀加工的方向。再次,采用Niblack分割方法分割原始图像的灰度图,基于分割后的二值图像掩模亮度信息,得到光斑图像的亮度特征。最后,分析光斑亮度特征与激光烧蚀加工方向、激光功率的关系。亮度特征与加工方向的相关系数小于0.09,与激光功率的相关系数大于0.5。结果表明:光斑图像的亮度特征不受加工方向的影响,光斑亮度特征具有较强的稳定性,可用于激光烧蚀功率的识别。

Abstract

The plasma is produced during the monocrystalline silicon material is ablated by femtosecond laser, whose spot image can obtained by the collection of the radiation signals of plasma with CCD camera. Considering the characteristics that the contrast between the edge and background areas of plasma spot is not obvious and the signal to noise ratio is low, the spot image is enhanced and the brightness characteristics of this spot image are further analyzed. Firstly, the original spot images are filtered and then enhanced by the principal component analysis method. The obtained first principal component image is pseudo-color processed in order to analyze its energy distribution, and the core region of the spot is segmented according to its energy distribution information. Secondly, the centroid and long axis of the original image as well as the centroid, long and short axes of the core ablation zone are calculated, and the geometrical features of the image are analyzed. Based on these, the laser ablation direction is determined. Thirdly, the Niblack segmentation method is used to divide the gray image of the original image, and the luminance characteristics of the spot image are obtained based on the luminance information of the segmented binary image mask. Finally, the relationship of brightness characteristics of spot with laser ablation processing direction and laser power is analyzed. The correlation coefficient between brightness characteristics and processing direction is less than 0.09, and the correlation coefficient between brightness characteristics and laser power is more than 0.5. The results show that the luminance characteristics of spot image are not affected by the processing direction and the spot light intensity is stable, which can be used for the identification of laser ablation power.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:TN249;TP391.4

DOI:10.3788/cjl201946.0202001

所属栏目:激光制造

基金项目:国家自然科学基金(71601039)

收稿日期:2018-09-19

修改稿日期:2018-10-11

网络出版日期:2018-10-22

作者单位    点击查看

王福斌:华北理工大学电气工程学院, 河北 唐山 063210卡尔加里大学机械及制造工程系, 阿尔伯塔 卡尔加里 T2N 1N4
刘洋:华北理工大学电气工程学院, 河北 唐山 063210
潘兴辰:华北理工大学电气工程学院, 河北 唐山 063210
王宜文:华北理工大学电气工程学院, 河北 唐山 063210

联系人作者:王福斌(wfb2313@126.com)

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引用该论文

Wang Fubin,Liu Yang,Pan Xingchen,Wang Yiwen. Image Enhancement and Luminance Analysis of Femtosecond Laser Induced Plasma Spot[J]. Chinese Journal of Lasers, 2019, 46(2): 0202001

王福斌,刘洋,潘兴辰,王宜文. 飞秒激光等离子体光斑图像增强及亮度分析[J]. 中国激光, 2019, 46(2): 0202001

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