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一种非线性相位误差的全场补偿方法

A Full-Field Compensation Method for Nonlinear Phase Error

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摘要

提出了一种非线性相位误差的全场补偿方法,通过对参考面相位的多次测量,提高了参考面的解相精度,提取出一个逼近理想值的期望相位面,并用该期望相位面检测非线性相位误差。重构待测物体时,可直接用物体展开相位值在查找表中查找对应的非线性相位误差,并以此对物体的展开相位进行全场补偿。采用所提方法重构已知具体高度的平面,平均绝对误差的最大值从0.48 mm减小到0.06 mm,方均根误差的最大值从0.55 mm减小到0.07 mm。

Abstract

A full-field compensation method for nonlinear phase error is proposed. By measuring the reference plane for multiple times, the accuracy of phase unwrapping on the reference plane can be efficiently improved. An expected phase plane approaching to the ideal values can be extracted from these multiple measured phases on the reference plane. This expected phase plane can be used to detect the nonlinear phase error. When reconstructing the measured object, the nonlinear phase error can be directly searched in the look-up table with the unwrapped phase of the object, then the full-field unwrapping phase of the object be compensated. By using the proposed method to reconstruct several height-known flat planes, the maximum mean absolute error (MAE) is decreased from 0.48 mm to 0.06 mm and the maximum root-mean-square error (RMSE) is decreased from 0.55 mm to 0.07 mm.

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中图分类号:TN27

DOI:10.3788/aos201939.0312001

所属栏目:仪器,测量与计量

基金项目:国家科技重大专项(2009ZX02204-008)

收稿日期:2018-08-16

修改稿日期:2018-09-15

网络出版日期:2018-10-11

作者单位    点击查看

蔡文娟:四川大学光电科学技术系, 四川 成都 610064
曹益平:四川大学光电科学技术系, 四川 成都 610064
付光凯:四川大学光电科学技术系, 四川 成都 610064
王亚品:四川大学光电科学技术系, 四川 成都 610064
万莹莹:四川大学光电科学技术系, 四川 成都 610064
李城梦:四川大学光电科学技术系, 四川 成都 610064
王璐:四川大学光电科学技术系, 四川 成都 610064

联系人作者:曹益平(ypcao@scu.edu.cn)

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引用该论文

Cai Wenjuan,Cao Yiping,Fu Guangkai,Wang Yapin,Wan Yingying,Li Chengmeng,Wang Lu. A Full-Field Compensation Method for Nonlinear Phase Error[J]. Acta Optica Sinica, 2019, 39(3): 0312001

蔡文娟,曹益平,付光凯,王亚品,万莹莹,李城梦,王璐. 一种非线性相位误差的全场补偿方法[J]. 光学学报, 2019, 39(3): 0312001

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