半导体光电, 2019, 40 (1): 38, 网络出版: 2019-03-25   

高功率蓝紫光半导体激光器及其光场匀化研究

High-power Blue-violet Laser Diode and Its Optical Field Homogenization
作者单位
1 长春理工大学 光电工程学院 光电工程国家及实验室教学示范中心, 长春 130022
2 中国科学院半导体研究所全固态光源实验室, 北京 100083
3 中国科学院半导体研究所光电系统实验室, 北京 100083
摘要
设计并实现了一种高功率、高光场均匀性的蓝紫光半导体激光器。采用光纤耦合技术, 将28只输出功率为350mW的半导体激光器的输出激光, 通过非球面透镜分别耦合进纤芯直径为400μm、数值孔径为0.22的光纤中, 光纤经捆绑合束进行功率扩展后输出功率达8.1W。利用Zemax软件设计了复眼透镜组对激光光场进行整形匀化, 仿真结果表明, 光场均匀度从匀化前的48%提高到匀化后的86%, 实验测量光场均匀度达到84.4%。为高精度3D打印技术提供了一种理想光源。
Abstract
For the lighting requirements of high-precision 3D printing, a blue-violet laser diode with high power and high field uniformity was designed and achieved for the first time. Every laser diode with the output power of 350mW was coupled into the fiber with a core diameter of 400μm and numerical aperture of 0.22 using an aspherical lens. 28 fibers were mechanically bundled to expand the output power to achieve 8.1W. A set of fly eye lenses were designed to homogenize the laser field using Zemax software. Simulation results indicate that the uniformity of laser field was increased from 48% to 86%, and an uniformity of 84.4% was realized after laser homogenization experiment, thus blue-violet laser source with high power and high field uniformity was successfully obtained for 3D printing and laser medical treatment.

王玉, 张玲, 杨盈莹, 于海娟, 高瑀含, 白云瑞, 杨松, 邹淑珍, 董连和, 林学春. 高功率蓝紫光半导体激光器及其光场匀化研究[J]. 半导体光电, 2019, 40(1): 38. WANG Yu, ZHANG Ling, YANG Yingying, YU Haijuan, Gao Yuhan, BAI Yunrui, YANG Song, ZOU Shuzhen, DONG Lianhe, LIN Xuechun. High-power Blue-violet Laser Diode and Its Optical Field Homogenization[J]. Semiconductor Optoelectronics, 2019, 40(1): 38.

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