提出一种新的柔性抛光技术——液浮法抛光, 通过软件仿真及实验对其进行探索性研究。针对抛光液为具有剪切增稠效应的流体, 利用软件对该类液体的液浮法抛光技术模型进行流场分析, 得到液浮抛光模型的流场压强、剪切力分布情况。仿真结果表明, 液浮抛光技术对被加工件表面具有一定的剪切效果, 可以实现对工件材料的去除。搭建实验平台, 设计一组实验, 其中配置以粒径12 nm的二氧化硅为溶质, 分子量200的聚乙二醇为溶剂的非牛顿幂律流体作为抛光液的剪切增稠基液(其中二氧化硅质量分数为9 %), 加入质量分数为18 %的氧化铈作为磨料的抛光液, 对于初始粗糙度为23.97 nm的K9玻璃经过90 min的抛光, 其粗糙度可达到1.023 nm, 实验结果表明, 该技术可用于光学元件的抛光加工。

A novel flexible liquid float polishing technique was presented through software simulation and experiment. Firstly, the fluent software was employed to analyze the flow field of the liquid float polishing model which had shear thickening effect. The flow field pressure and shear force distribution of the liquid float polishing model were obtained. The simulation results show that the liquid float polishing technology has certain shearing effect on the surface of the workpiece, and the workpiece material can be removed effectively. Then, an experimental platform was established to verify the simulation results. A kind of polishing solution based on non-Newtonian power law fluid was prepared which composed of SiO2 (particle size 12 nm) served as solvend, polyethylene glycol (molecular weight of 200) served as solvent, and the cerium oxide with a mass fraction of 18% is also added as the abrasive. The surface roughness of K9 glass can be effectively reduced from 23.97 nm to 1.023 nm after 90 min polishing by using the novel flexible liquid float polishing technique. The experimental results show that this technology can be used for the processing of optical components.