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激光准直测量中的光漂补偿方法

Methods for Laser Beam Drift Compensation in Laser Alignment Measurement

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摘要

以二维位移测量为应用实例,在对光漂的产生机制及特性进行分析的基础上,提出了一种差分补偿和共路补偿相结合的光漂补偿方案,并对所采用的两种补偿方法进行了详细分析及实验验证。实验结果表明,对于光线角度漂移和总漂移,差分补偿法分别可以实现35.2%和54.4%的补偿效果,共路补偿法对光线总漂移可以实现42.2%的补偿效果。研究结果可为解决激光准直测量中光漂补偿这一共性问题提供技术支持。

Abstract

With the two-dimensional displacement measurement as an application example and based on the analysis of the generation mechanism and characteristics of laser beam drifts, a method for laser beam drift compensation is proposed by the combination of differential compensation with the common path compensation. In addition, these two compensation methods are analyzed in detail and verified by experiments. The experimental results show that, the compensation effects of the angular drift and total drift of the beam for the differential compensation method are 35.2% and 54.4%, respectively. In contrast, the compensation effect of the total drift of the beam for the common path compensation method is 42.2%. The research results can providea technical support for solving the common problem of beam drift compensation in laser alignment measurement.

Newport宣传-MKS新实验室计划
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中图分类号:TN247

DOI:10.3788/lop56.071203

所属栏目:仪器,测量与计量

基金项目:国家自然科学基金河南省联合项目(U1304507)、河南省自然科学基金(182300410189)、河南省科技发展计划(172102210552,182102310732)

收稿日期:2018-09-29

修改稿日期:2018-10-16

网络出版日期:2018-10-24

作者单位    点击查看

翟玉生:郑州轻工业大学物理与电子工程学院, 河南 郑州 450002
柳文龙:郑州轻工业学院机电工程学院, 河南 郑州 450002
王新杰:郑州轻工业学院机电工程学院, 河南 郑州 450002
谢泽铧:郑州轻工业大学物理与电子工程学院, 河南 郑州 450002
闫赛赛:郑州轻工业大学物理与电子工程学院, 河南 郑州 450002
郭逸航:郑州轻工业大学物理与电子工程学院, 河南 郑州 450002

联系人作者:翟玉生(hf_sy@sohu.com)

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引用该论文

Zhai Yusheng,Liu Wenlong,Wang Xinjie,Xie Zehua,Yan Saisai,Guo Yihang. Methods for Laser Beam Drift Compensation in Laser Alignment Measurement[J]. Laser & Optoelectronics Progress, 2019, 56(7): 071203

翟玉生,柳文龙,王新杰,谢泽铧,闫赛赛,郭逸航. 激光准直测量中的光漂补偿方法[J]. 激光与光电子学进展, 2019, 56(7): 071203

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