法布里珀罗(F-P)标准具间隔d的高准确度测量对干涉测量结果具有非常重要的影响。论文基于F-P干涉成像图片信息, 结合峰位坐标局域细分原理和圆方程回归, 尤其应用了一种新型的虚拟面阵像元细分和信号平滑化技术, 准确地求出干涉图像各同心圆环直径Di, 实现干涉级次整数部分k0和小数部分ε的准确计算, 完成F-P间隔d的三波长小数重合法测定。实验对比分析了细分和非细分方式对测量结果的影响, 测得细分方式下的d=(2 009.961 91±0.000 06) μm, d的不确定度粗估值(Uε/k0)=9.8×10-7。实验验证了像元细分方法的有效性, 为提高间隔d的测量准确度提供了有效的途径和方法。

The high accuracy of Fabry-Perot (F-P) etalon interval d has a very important influence on the interference measurement. Based on F-P interference imaging information, combined with the local subdivision principle of the peak coordinate and the regression of circular equation, in particular, a new method of virtual plane pixel subdivision and signal smoothing was applied, and the concentric ring diameter Di was obtained accurately. Then the accurate calculation of the decimal part and the integer part of the interference order was realized, and the measurement of the interval d by excess fraction method with three-standard wavelengths was completed. In addition, the influence of subdivision and non-subdivision on measurement results was analyzed. With the virtual pixel subdivision, the interval d is (2 009.961 91±0.000 06) μm, and (Uε/k0) is 9.8×10-7.Experiments verify the effectiveness of pixel subdivision method, providing effective ways to improve the accuracy of interval d.