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基于立方体分光棱镜的干涉投影傅里叶变换轮廓术

Interferometric Projection Fourier Transform Profilometry Based on Cube Beam Splitting Prism

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摘要

提出了一种基于立方体分光棱镜的干涉投影傅里叶变换轮廓术。基于杨氏双缝干涉原理, 对立方体分光棱镜的干涉投影理论进行理论分析和仿真实验, 通过调节立方体分光棱镜的安装角度可实现干涉投影条纹周期的任意调节, 结果证实了该干涉投影系统的可行性以及灵活性。对小脚丫模型进行了三维面形重构, 结果表明:干涉条纹相位稳定且强度分布均匀, 利用所提方法可以很好地恢复物体的三维形貌。

Abstract

An interferometric projection Fourier transform profilometry based on cube splitting prism is proposed. The interference projection theory of cube splitting prism is theoretically analyzed and simulated based on Young′s double-slit interference principle. By adjusting the installation angle of the prism, any adjustment of the interference projection fringe period can be realized. The results prove the feasibility and flexibility of the interference projection system. The three-dimensional shape reconstruction of a small foot model is carried out, and the experimental results show that the interference fringe phase is stable and the intensity distribution is uniform, the proposed method can be used to recover the three-dimensional shape of the object well.

Newport宣传-MKS新实验室计划
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中图分类号:TN247

DOI:10.3788/aos201939.0412013

所属栏目:仪器,测量与计量

基金项目:深圳市科技创新基金(JCYJ20170817114512319, JCYJ20170817114558026)

收稿日期:2018-11-07

修改稿日期:2018-12-03

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作者单位    点击查看

李小燕:北京理工大学光电学院, 北京 100081
文永富:北京理工大学光电学院, 北京 100081北京理工大学深圳研究院, 广东 深圳 518057
程灏波:北京理工大学光电学院, 北京 100081北京理工大学深圳研究院, 广东 深圳 518057
吴恒宇:北京理工大学光电学院, 北京 100081
王华英:北京理工大学深圳研究院, 广东 深圳 518057

联系人作者:文永富(wyf2015@bit.edu.cn); 程灏波(chenghaobo@tsinghua.org.cn);

【1】Lu M T, Su X Y, Cao Y P, et al. 3D shape reconstruction algorithms for modulation measuring profilometry with synchronous scanning[J]. Chinese Journal of Lasers, 2016, 43(3): 0308006.
卢明腾, 苏显渝, 曹益平, 等. 同步扫描的调制度测量轮廓术三维面形重建算法[J]. 中国激光, 2016, 43(3): 0308006.

【2】Geng J. Structured-light 3D surface imaging: a tutorial[J]. Advances in Optics and Photonics, 2011, 3(2): 128-160.

【3】Li B W, Zhang S. Microscopic structured light 3D profilometry: binary defocusing technique vs. sinusoidal fringe projection[J]. Optics and Lasers in Engineering, 2017, 96: 117-123.

【4】Su X Y, Zhang Q C, Chen W J. Three-dimensional imaging based on structured illumination[J]. Chinese Journal of Lasers, 2014, 41(2): 0209001.
苏显渝, 张启灿, 陈文静. 结构光三维成像技术[J]. 中国激光, 2014, 41(2): 0209001.

【5】Guo Z M, Zhang Q C, Ma K. Analysis and correction of the nonlinearity of the structured light illumination in three-dimensional shape measurement[J]. Laser Journal, 2011, 32(1): 14-16.
郭志明, 张启灿, 麻珂. 三维面形测量中结构光场的非线性分析和校正[J]. 激光杂志, 2011, 32(1): 14-16.

【6】Takeda M, Mutoh K. Fourier transform profilometry for the automatic measurement of 3-D object shapes[J]. Applied Optics, 1983, 22(24): 3977.

【7】Zhu R G. Study on theory and application of fiber optic projector for 3-D profile measurement[D]. Harbin: Harbin Engineering University, 2009.
朱荣刚. 基于光纤投影的三维轮廓测量理论与应用研究[D]. 哈尔滨: 哈尔滨工程大学, 2009.

【8】Sun J S, Zuo C, Feng S J, et al. Improved intensity-optimized dithering technique for 3D shape measurement[J]. Optics and Lasers in Engineering, 2015, 66: 158-164.

【9】Wang Y, Liu H Y, Song B G. Measurement of dual frequency interference fringe morphology under parallel optical wavefront modulation[J]. Journal of Applied Optics, 2017, 38(6): 0603001.
王一, 刘会艳, 宋宝根. 平行光波阵面调制下的双频干涉条纹形貌测量[J]. 应用光学, 2017, 38(6): 0603001.

【10】Zhu R G, Zhu R H, Song Q, et al. Applied research on fiber-optic interferometer projection of Fourier transform profilometry[J]. Chinese Journal of Lasers, 2013, 40(7): 0708003.
朱荣刚, 朱日宏, 宋倩, 等. 基于光纤干涉投影的傅里叶变换轮廓术应用研究[J]. 中国激光, 2013, 40(7): 0708003.

【11】Pennington T L, Xiao H, May R, et al. Miniaturized 3-D surface profilometer using a fiber optic coupler[J]. Optics & Laser Technology, 2001, 33(5): 313-320.

【12】Bulut K, Inci M N. Three-dimensional optical profilometry using a four-core optical fibre[J]. Optics & Laser Technology, 2005, 37(6): 463-469.

【13】Yuan L B, Wang X. Four-beam single fiber optic interferometer and its sensing characteristics[J]. Sensors and Actuators A: Physical, 2007, 138(1): 9-15.

【14】Fan H, Zhao H, Tan Y S. Automatic profilometry by dual-frequency of optical fiber projection grating[J]. Acta Optica Sinica, 1998, 18(1): 86-89.
范华, 赵宏, 谭玉山. 光纤投影双频自动轮廓测量术[J]. 光学学报, 1998, 18(1): 86-89.

【15】Li X T. Study on some key issues of interferometric fiber-optic sensor in practice[D]. Beijing: Tsinghua University, 2003.
李昕彤. 干涉型光纤传感器实用中若干关键问题的研究[D]. 北京: 清华大学, 2003.

【16】Matthews H J, Hamilton D K, Sheppard C J R. Surface profiling by phase-locked interferometry[J]. Applied Optics, 1986, 25(14): 2372.

【17】Mercer C R, Beheim G. Fiber optic phase stepping system for interferometry[J]. Applied Optics, 1991, 30(7): 729-734.

【18】Zhang C, Duan F J, Xing M H, et al. Fiber-optic interferometer projection of real-time Fourier profilometry[J]. Acta Optica Sinica, 2011, 31(2): 0207001.
张超, 段发阶, 邢明浩, 等. 光纤干涉投射实时傅里叶轮廓术的研究[J]. 光学学报, 2011, 31(2): 0207001.

【19】陈家璧, 苏显渝. 光学信息技术原理及应用 [M]. 2版. 北京: 高等教育出版社, 2009: 361-363.

【20】Wen Y F, Su X Y, Zhang Q C. Universal calculation formula and system calibration method in Fourier transform profilometry[J]. Chinese Journal of Lasers, 2009, 36(8): 2094-2098.
文永富, 苏显渝, 张启灿. 傅里叶变换轮廓术中一种普适的计算公式和系统标定方法[J]. 中国激光, 2009, 36(8): 2094-2098.

【21】Lu P, Sun C K, Wang P. Fringe projection phase-to-height mapping model and its calibration method[J]. Acta Optica Sinica, 2018, 38(2): 0212004.
陆鹏, 孙长库, 王鹏. 条纹投影相位高度转换映射模型及其标定方法[J]. 光学学报, 2018, 38(2): 0212004.

【22】Zhou C L, Yu D M, Han W Z, et al. Study on phase unwrapping of calibration for 3-D profilometry[J]. Journal of Tianjin University of Light Industry, 2002(1): 35-37.
周聪玲, 于德敏, 韩皖贞, 等. 三维物体轮廓测量标定技术中解相问题的研究[J]. 天津轻工业学院学报, 2002(1): 35-37.

【23】刘寅立, 王剑亮, 陈靖, 等. MATLAB数值计算案例分析[M]. 北京: 北京航空航天大学出版社, 2011: 50-52.

【24】Peng J, Wang L, Gao X R, et al. Study on optimization of parameter selection in Fourier transform profilometry[J]. Modern Electronics Technique, 2009, 32(2): 98-101.
彭瑾, 王黎, 高晓蓉, 等. Fourier变换轮廓术中参数的选择和优化研究[J]. 现代电子技术, 2009, 32(2): 98-101.

【25】Qu W J, Choo C O, Singh V R, et al. Quasi-physical phase compensation in digital holographic microscopy[J]. Journal of the Optical Society of America A, 2009, 26(9): 2005-2011.

引用该论文

Li Xiaoyan,Wen Yongfu,Cheng Haobo,Wu Hengyu,Wang Huaying. Interferometric Projection Fourier Transform Profilometry Based on Cube Beam Splitting Prism[J]. Acta Optica Sinica, 2019, 39(4): 0412013

李小燕,文永富,程灏波,吴恒宇,王华英. 基于立方体分光棱镜的干涉投影傅里叶变换轮廓术[J]. 光学学报, 2019, 39(4): 0412013

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