中国激光, 2019, 46 (4): 0402001, 网络出版: 2019-05-09
单晶金刚石飞秒激光加工的烧蚀阈值实验 下载: 1723次
Experiment on Ablation Threshold of Single Crystal Diamond Produced by Femtosecond Laser Processing
激光技术 激光器与激光光学 激光烧蚀 飞秒激光 单晶金刚石 烧蚀阈值 laser technique lasers and laser optics laser ablation femtosecond laser single crystal diamond ablation threshold
摘要
采用不同功率的飞秒激光对单晶金刚石分别进行了单脉冲分离烧蚀实验和多脉冲累积烧蚀实验,计算得到了单晶金刚石材料的单脉冲烧蚀阈值和多脉冲累积烧蚀阈值,并研究了多脉冲作用下单晶金刚石烧蚀阈值的变化。结果表明:单晶金刚石的飞秒激光单脉冲烧蚀阈值为8.80 J/cm
2;随着有效脉冲数增加,烧蚀阈值逐渐减小;当有效脉冲数小于124时,烧蚀阈值随有效脉冲数的增加而急剧减小;当有效脉冲数增加到486后,烧蚀阈值减小的趋势趋于平缓。有效脉冲数486、激光平均功率10.7 W是最优的激光加工工艺参数。
Abstract
Single-pulse separated ablation and multi-pulse cumulative ablation experiments are performed on single crystal diamond by femtosecond laser with different powers. The single-pulse ablation threshold and multi-pulse cumulative ablation threshold of single-crystal diamond materials are calculated, and the variation characteristics of ablation threshold of single-crystal diamond at multi-pulse are studied. The results show that the threshold of femtosecond laser ablation of single crystal diamond is 8.80 J/cm
2. The ablation threshold of single crystal diamond materials decreases with the increase of effective pulse number. When the effective pulse number is less than 124, the ablation threshold decreases sharply with the increase of the effective pulse number. When the effective pulse number increases to 486, the decreasing trend of ablation threshold tends to be gentle. The optimum laser processing parameters are as follows: the effective pulse number is 486, and the laser average power is 10.7 W.
陈根余, 朱智超, 殷赳, 熊彪, 金梦奇. 单晶金刚石飞秒激光加工的烧蚀阈值实验[J]. 中国激光, 2019, 46(4): 0402001. Genyu Chen, Zhichao Zhu, Jiu Yin, Biao Xiong, Mengqi Jin. Experiment on Ablation Threshold of Single Crystal Diamond Produced by Femtosecond Laser Processing[J]. Chinese Journal of Lasers, 2019, 46(4): 0402001.