光学 精密工程, 2019, 27 (1): 78, 网络出版: 2019-04-06
三维表面粗糙度测量方法综述
Review of measurement methods for areal surface roughness
三维表面粗糙度 测量方法 接触式测量 非接触式测量 纳米表面粗糙度分析 areal surface roughness measurement methods contact measurement non-contact measurement nanometer-scale surface roughness analysis
摘要
表面粗糙度测量是评估零件表面特性的重要手段。经过二十多年的发展, 三维表面粗糙度逐渐成为反映工件表面特性的重要指标。本文总结并比较了接触式测量法、非接触式测量法和纳米表面粗糙度分析法中常用三维表面粗糙度的测量原理及特点。针对每种测量方法的发展现状, 本文讨论了其适用范围及局限性, 并指出了未来的发展方向。
Abstract
The measurement of surface roughness is a crucial tool for characterizing engineering surfaces. After more than 20 years of development, areal surface roughness has become a key factor that reflects the characteristics of engineering surfaces. This study includes summaries and comparisons of the characteristics of areal surface roughness, contact and non-contact measurement methods, and nanometer-scale surface roughness analysis methods. The applications and limitations of existing methods are also analyzed, and the direction for future development is presented.
何宝凤, 丁思源, 魏翠娥, 刘柄显, 石照耀. 三维表面粗糙度测量方法综述[J]. 光学 精密工程, 2019, 27(1): 78. HE Bao-feng, DING Si-yuan, WEI Cui-e, LIU Bing-xian, SHI Zhao-yao. Review of measurement methods for areal surface roughness[J]. Optics and Precision Engineering, 2019, 27(1): 78.
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